Preparation and Characterization of Aluminum Nitride Thin Films with the Potential Application in Electro-Acoustic Devices

Subject Areas : Polymer

Fatemeh Hajakbari ¹

1 - Department of Physics, Karaj Branch, Islamic Azad University, Karaj, Iran.

Received: 2020-05-27 Accepted : 2020-05-27 Published : 2020-05-01

Keywords: Morphology, AlN, Ion beam sputtering, optical properties, Film thickness,