@article{
  author = {Hajakbari, Fatemeh},
  title = {Preparation and Characterization of Aluminum Nitride Thin Films with the Potential Application in Electro-Acoustic Devices},
  journal = {Journal of Applied Chemical Research},
  year = {2020},
  volume = {14},
  issue = {2},
  pages = {48-57},
  doi = {},
  url = {https://sanad.iau.ir/fa/Article/865538}
}