@article{
  author = {Hajakbari, Fatemeh},
  title = {Preparation and Characterization of Aluminum Nitride Thin Films with the Potential Application in Electro-Acoustic Devices},
  journal = {Journal of Applied Chemical Research},
  year = {2020},
  volume = {14},
  number = {2},
  pages = {48-57},
  doi = {}
}