List of Articles Ion beam sputtering Open Access Article Abstract Page Full-Text 1 - Effect of Thickness on Structural and Morphological Properties of AlN Films Prepared Using Single Ion Beam Sputtering Fatemeh Hajakbari Alireza Hojabri Majid Mojtahedzadeh Larijani Open Access Article Abstract Page Full-Text 2 - Preparation and Characterization of Aluminum Nitride Thin Films with the Potential Application in Electro-Acoustic Devices Fatemeh Hajakbari Open Access Article Abstract Page Full-Text 3 - Effect of substrate temperature on structural and physical properties of carbon thin films prepared by ion beam sputtering deposition method elham mohagheghpour Marjan Rajabi Reza gholamipour Majid Mojtahedzadeh Larijani shahab Sheibani