Effect of Thickness on Structural and Morphological Properties of AlN Films Prepared Using Single Ion Beam Sputtering

Subject Areas : Polymer

Fatemeh Hajakbari ¹ ()
Alireza Hojabri ² ()
Majid Mojtahedzadeh Larijani ³ ()

Received: 2015-11-11 Accepted : 2015-11-11 Published : 2014-07-01

Keywords: Structural Properties, AlN, Ion beam sputtering, optical properties,