Effect of Thickness on Structural and Morphological Properties of AlN Films Prepared Using Single Ion Beam Sputtering

Subject Areas : Polymer

Fatemeh Hajakbari ¹ , Alireza Hojabri ² , Majid Mojtahedzadeh Larijani ³

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Received: 2015-11-11 Accepted : 2015-11-11 Published : 2014-07-01

Keywords: Structural Properties, AlN, Ion beam sputtering, optical properties,