Interdigitated array electrods1 were prepared by nanolithography of gold on alumina substrate via PVD method. ZnOnanorods used as sensor were synthesized by hydrothermal method on a spotter-coated seed layer of zinc oxide. The synthesized nanorods were characterized by X-ray diffraction (XRD), high resolution transmission electron microscopy (HR-TEM), scanning electron microscopy (SEM), and atomic force microscopy (AFM). Sensor functioning was investigated with regard to four alcoholic gases. In order to improve the sensing conditions, the sensitivity and response of ZnOnanorods in the temperature range of 50-300°C were studied. The working temperature of 47°C was selected as the optimal temperature and important variables such as sensitivity of the sensor, response time, and recovery time were obtained for the four testing gases at constant temperature and different concentrations. Results revealed that by usingZnO array nanorods,alcoholic gases with highsensitivity can be detected.
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