A New Model of Pull-in Voltage for MEMS Variable Capacitive with Fully-clamped Diaphragm
Subject Areas : Majlesi Journal of Telecommunication DevicesBahram Azizollah Ganji 1 , Sara Gholinezhad Shafagh 2
1 - Electrical Department, Babol University of Technology
2 - Electrical Department, Babol University of Technology
Keywords:
Abstract :
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