A New Model of Pull-in Voltage for MEMS Variable Capacitive with Fully-clamped Diaphragm
Subject Areas : Majlesi Journal of Telecommunication Devices
Bahram
Azizollah Ganji
1
(Electrical Department, Babol University of Technology)
Sara
Gholinezhad Shafagh
2
(Electrical Department, Babol University of Technology)
Keywords:
Abstract :
[1] C. Gibbons and R. N. Miles, “Design of A Biomimetic Directional Microphone Diaphragm”, Proc. of IMECE InternalMechanical Engineering Congress and Exposition, November 5-10, 2000. Orlando, Florida, 2000, pp. 1-7.
[2] P. C. Hsu, C. H. Mastrangelo and K. D. Wise, “A High Density Polysilicon Diaphragm Condenser Microphone,” in Tech. Digest of. IEEE 11th International Conference on Micro Electro Mechanical Systems (MEMS), Heidelberg, Germany, 1998, pp. 580-585.
[3] M. Pederson, W. Olthuis and P. Bergveld, “High Performance Condenser Microphone with Fully Integrated CMOS Amplifier and DC-DC Voltage Converter”, Journal of Microelectromechanical Systems, Vol. 7, No. 4, pp. 387-394,Dec. 1998.
[4] S. Timoshenko and S. Woinowsky-Krieger, “Theory of Plates and Shells”, McGraw-Hill Book Company New York,1959, pp. 397-428.
[5] P. M. Osterberg and S. D. Senturia, “M-TEST: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures”, Journal of Microelectromechanical Systems, Vol. 6, No. 2, pp. 107-118, June. 1997.
[6] SazzadurChowdhury, M. Ahmadi, and W. C. Miller, “Nonlinear Effects in MEMS Capacitive Microphone Design”, Electrical and Computer Engineering University of Windsor, Windsor, Ontario,N9B 3P4.
[7] Roger T. Howe, Antonio J. Ricco, “MEMS Linear and Nonlinear statics and dynamics, Microsystems”, Springer NewYork Dordrecht Heidelberg London, 2010, pp. 72
[8] SingresuS. Rao, “Vibration of continuous systems”, 1st ed. John Wiley & Sons, Inc. Hoboken, New Jersey, (2007), Chap.11, pp. 317.
[9] SingresuS. Rao, “Vibration of continuous systems”, 1st ed. ,John Wiley & Sons, Inc. Hoboken, New Jersey, (2007), Chap. 14, pp. 458.
[10] SingresuS. Rao, “Vibration of continuous systems”, 1st ed. ,John Wiley & Sons, Inc. Hoboken, New Jersey, (2007), Chap. 14, pp. 459.
[11] S. Timoshenko, S. Woinowsky-Krieger, “Theory of Plates and Shells”, Second Edition”, McGraw-Hill BookCompany, 1959, pp. 5.
[12] William Rowan Hamilton, “SECOND ESSAY ON A GENERAL METHOD IN DYNAMICS”, Philosophical Transactions of the Royal Society, part I for 1835, pp. 95–144.
