A New Model of Pull-in Voltage for MEMS Variable Capacitive with Fully-clamped Diaphragm
محورهای موضوعی : Majlesi Journal of Telecommunication DevicesBahram Azizollah Ganji 1 , Sara Gholinezhad Shafagh 2
1 - Electrical Department, Babol University of Technology
2 - Electrical Department, Babol University of Technology
کلید واژه: Analytical model, en, fully-clamped diaphragm, MEMS capacitive, strain energy, Pull-in voltage,
چکیده مقاله :
In this paper a new model of Pull-in Voltage for MEMS capacitor with fully clamped diaphragm is presented. This model not only makes it possible to calculate the exact value of pull-in voltage in a capacitor but also provides the ability to detect the accurate deflection of a fully clamped diaphragm. By introducing this model, the precise value of pull-in voltage at the border, between stable and un-stable state, can be calculated. As an advantage of this new achievement, it is exhibited that the all theoretical equations are fully compatible with simulation results using finite element analysis (FEA).
[1] C. Gibbons and R. N. Miles, “Design of A Biomimetic Directional Microphone Diaphragm”, Proc. of IMECE InternalMechanical Engineering Congress and Exposition, November 5-10, 2000. Orlando, Florida, 2000, pp. 1-7.
[2] P. C. Hsu, C. H. Mastrangelo and K. D. Wise, “A High Density Polysilicon Diaphragm Condenser Microphone,” in Tech. Digest of. IEEE 11th International Conference on Micro Electro Mechanical Systems (MEMS), Heidelberg, Germany, 1998, pp. 580-585.
[3] M. Pederson, W. Olthuis and P. Bergveld, “High Performance Condenser Microphone with Fully Integrated CMOS Amplifier and DC-DC Voltage Converter”, Journal of Microelectromechanical Systems, Vol. 7, No. 4, pp. 387-394,Dec. 1998.
[4] S. Timoshenko and S. Woinowsky-Krieger, “Theory of Plates and Shells”, McGraw-Hill Book Company New York,1959, pp. 397-428.
[5] P. M. Osterberg and S. D. Senturia, “M-TEST: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures”, Journal of Microelectromechanical Systems, Vol. 6, No. 2, pp. 107-118, June. 1997.
[6] SazzadurChowdhury, M. Ahmadi, and W. C. Miller, “Nonlinear Effects in MEMS Capacitive Microphone Design”, Electrical and Computer Engineering University of Windsor, Windsor, Ontario,N9B 3P4.
[7] Roger T. Howe, Antonio J. Ricco, “MEMS Linear and Nonlinear statics and dynamics, Microsystems”, Springer NewYork Dordrecht Heidelberg London, 2010, pp. 72
[8] SingresuS. Rao, “Vibration of continuous systems”, 1st ed. John Wiley & Sons, Inc. Hoboken, New Jersey, (2007), Chap.11, pp. 317.
[9] SingresuS. Rao, “Vibration of continuous systems”, 1st ed. ,John Wiley & Sons, Inc. Hoboken, New Jersey, (2007), Chap. 14, pp. 458.
[10] SingresuS. Rao, “Vibration of continuous systems”, 1st ed. ,John Wiley & Sons, Inc. Hoboken, New Jersey, (2007), Chap. 14, pp. 459.
[11] S. Timoshenko, S. Woinowsky-Krieger, “Theory of Plates and Shells”, Second Edition”, McGraw-Hill BookCompany, 1959, pp. 5.
[12] William Rowan Hamilton, “SECOND ESSAY ON A GENERAL METHOD IN DYNAMICS”, Philosophical Transactions of the Royal Society, part I for 1835, pp. 95–144.
