Sensitivity Analysis of Piezoelectric Microcantilever Excitability as Resonator

Subject Areas : micro and nano mechanics

Reza Ghaderi ¹

1 - Department of Mechanical Engineering, Shahrekord Branch, Islamic Azad University, Sharekord, Iran

Received: 2022-10-28 Accepted : 2023-02-21 Published : 2023-09-01

Keywords:

References:

• Yilmaz, C., Sahin, R., and Topal, E. S., Exploring the Static Acoustic Force Sensitivity Using Afm Micro-Cantilever Under Single-And Bimodal-Frequency Excitation, Measurement Science and Technology, Vol. 32, No. 11, 2021, pp. 115001.


• Alibakhshi, A., et al., Nonlinear Free and Forced Vibrations of a Dielectric Elastomer-Based Microcantilever for Atomic Force Microscopy, Continuum Mechanics and Thermodynamics, 2022, pp. 1-18.


• Ghaderi, R., Dehkordi, B. M., and Fard, A. R., Vibration and Sensitivity Analysis of Double-Layered Non-Uniform Piezoelectric Microcantilever as a Self-Sensing Mass Sensor, Physica Scripta, Vol. 96, No. 11, 2021, pp. 115205.


• Mistry, K., et al., Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor. Nano letters, Vol. 22, No. 8, 2022, pp. 3196-3203.


• Jia, H., Xu, P., and Li, X., Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid. Micromachines, Vol. 12, No. 6, 2021, pp. 645.


• Moshirpanahi, A., Haghighi, S. E., and Imam, A., Dynamic Modeling of a Cylindrical Nanoparticle Manipulation by AFM, Engineering Science and Technology, an International Journal, Vol. 24, No. 3, 2021, pp. 611-619.


• Mohammadi, S. Z., Moghadam, M., and Pishkenari, H. N., Dynamical Modeling of Manipulation Process in Trolling-Mode AFM, Ultramicroscopy, Vol. 197, 2019, pp. 83-94.


• Rotake, D., Darji, A., and Kale, N., Fabrication, Calibration, and Preliminary Testing of Microcantilever‐Based Piezoresistive Sensor for BioMEMS Applications, IET Nanobiotechnology, Vol. 14, No. 5, 2020, pp. 357-368.


• Kasambe, P., Bhole, K., and Bhoir, D., Analytical Modelling, Design Optimisation and Numerical Simulation of a Variable Width Cantilever Beam MEMS Switch, Advances in Materials and Processing Technologies, 2021, pp. 1-21.


• Angira, M., et al., A Novel Capacitive Rf-Mems Switch for Multi-Frequency Operation, Superlattices and Microstructures, Vo. 133, 2019, pp. 106204.


• Caruntu, D. I., et al., Frequency–Amplitude Response of Superharmonic Resonance of Second Order of Electrostatically Actuated MEMS Cantilever Resonators, International Journal of Non-Linear Mechanics, Vol. 133, 2021, pp. 103719.


• Park, C., et al., Highly Sensitive and Selective Detection of Single-Nucleotide Polymorphisms Using Gold Nanoparticle MutS Enzymes and a Micro Cantilever Resonator, Talanta, Vol. 205, 2019, pp. 120154.


• Mahmoodi Nasrabadi, H., et al., High Resolution Atomic Force Microscopy with an Active Piezoelectric Microcantilever, Review of Scientific Instruments, Vol. 93, No. 7, 2022, pp. 073706.


• Niranjan, A., Gupta, P., and Rajoriya, M., Piezoelectric MEMS Micro-Cantilever Biosensor for Detection of SARS–CoV2. in 2021 International Conference on Communication, Control and Information Sciences (ICCISc), IEEE, 2021.


• Katta, M., Sandanalakshmi, R., Simultaneous Tropical Disease Identification with PZT-5H Piezoelectric Material Including Molecular Mass Biosensor Microcantilever Collection, Sensing and Bio-Sensing Research, Vol. 32, 2021, pp. 100413.


• Manalis, S., Minne, S., and Quate, C., Atomic Force Microscopy for High Speed Imaging Using Cantilevers with an Integrated Actuator and Sensor, Applied Physics Letters, Vol. 68, No. 6, 1996, pp. 871-873.


• Rogers, B., et al., Improving Tapping Mode Atomic Force Microscopy with Piezoelectric Cantilevers, Ultramicroscopy, Vol. 100, No. 3-4, 2004, pp. 267-276.


• Wolf, K., Gottlieb, O., Nonlinear Dynamics of a Noncontacting Atomic Force Microscope Cantilever Actuated by a Piezoelectric Layer, Journal of Applied Physics, Vol. 91, No. 7, 2002, pp. 4701-4709.


• Fung, R. F., Huang, S. C., Dynamic Modeling and Vibration Analysis of The Atomic Force Microscope, J. Vib. Acoust., Vol. 123, No. 4, 2001, pp. 502-509.


• Mahmoodi, S. N., Afshari, M., and Jalili, N., Nonlinear Vibrations of Piezoelectric Microcantilevers for Biologically-Induced Surface Stress Sensing, Communications in Nonlinear Science and Numerical Simulation, Vol. 13, No. 9, 2008, pp. 1964-1977.


• Mahmoodi, S. N., Jalili, N., Piezoelectrically Actuated Microcantilevers: an Experimental Nonlinear Vibration Analysis, Sensors and Actuators A: Physical, Vol. 150, No. 1, 2009, pp. 131-136.


• Mahmoodi, S. N., Jalili, N., and Ahmadian, M., Subharmonics Analysis of Nonlinear Flexural Vibrations of Piezoelectrically Actuated Microcantilevers, Nonlinear Dynamics, Vol. 59, No. 3, 2010, pp. 397-409.


• Salehi-Khojin, A., Bashash, S., and Jalili, N., Modeling and Experimental Vibration Analysis of Nanomechanical Cantilever Active Probes, Journal of Micromechanics and Microengineering, Vol. 18, No. 8, 2008, pp. 085008.