Sensitivity Analysis of AFM Piezoelectric MC in Electromagnetic Excitation

Subject Areas : micro and nano mechanics

Ahmad Haghani ¹ , Reza Ghaderi ^{2 *}

1 - Department of Mechanics, Shahrekord Branch, Islamic Azad University, Shahrekord, Iran
2 - Department of Mechanical Engineering, Shahrekord Branch, Islamic Azad University, Shahrekord, Iran

Received: 2022-12-29 Accepted : 2025-05-14 Published : 2025-12-16

Keywords: Atomic Force Microscopes (AFM), Microcantilever Beams, Sensitivity Analysis,

Abstract :

Atomic Force Microscopes (AFM) are reliable and accurate tools for surface imaging, mechanical properties detection and measuring particle motion in nanoscale. The vibration behavior of the microcantilver (MC) in an AFM is an extremely crucial factor for its performance. Also, the dimensions of the MC contribute to its vibratory behavior. The exact surface topography of the sample and determining its mechanical properties and behavior requires thorough knowledge of the effects of different geometric parameters on the coefficients of the interaction forces and the vibration of the MC. In this paper, the authors analyze the dynamic behavior of an air piezoelectric MC under electromagnetic actuation. For this purpose, at first a dynamic model of the system was developed using the equation of motion of a continuous beam under vibrations. Then, the effects of the surface interaction force on the behavior of the MC under nonlinear vibrations is investigated. Also, a sensitivity analysis is carried out using Sobol method to study how the dimensions of a MC affect its nonlinear frequency.