Precision Force Measurement and Control in Micro Ultrasonic Machining

Subject Areas : Mechanical Engineering

Hamid  Zarepour Firouzabadi ¹ (Modern Manufacturing Technologies Research Center (MMTRC) Najafabad Branch, Islamic Azad University, Najafabad, Iran Department of Mechanical Engineering, Faculty of Engineering, Najafabad Branch, Islamic Azad University, Najafabad, Iran)

Received: 2017-01-08 Accepted : 2017-02-27 Published : 2017-11-06

Keywords: Micro ultrasonic machining, Measurement and control, Machining force, Static force,

Abstract :

Micro ultrasonic machining (Micro-USM) is a process with a great capability to generate micro features in hard and brittle materials. Despite some developments in micro-USM process, issues such as precision measurement and control of the machining force, which is crucial for stable machining conditions, need further investigations. In this paper, the precision measurement and control of the machining force is studied using a newly-developed force measurement configuration. The results of the force measurement for different levels of static force, abrasive particle size and amplitude of vibration demonstrated that the variation of measured machining force increases at higher static forces. Furthermore, a better control over the static load was acquired when feeding the abrasive slurry with particle size of 0.37 mm as compared to 1 mm and 3 mm particles leading to more stable machining conditions in micro-USM process. Finally, applying lower levels of vibration amplitude to the workpiece resulted in more stable machining conditions and lower static load errors.

References:

[1]  Sun, X. Q., Masuzawa, T., and Fujino, M., “Micro Ultrasonic Machining and Self-aligned Multilayer Machining/Assembly Technologies for 3D Micromachines”, Proceedings of the IEEE MEMS’96, San diego, CA, 1996, pp. 312-317.

[2]  Zhang, C., Rentsch, R., and Brinksmeier, E., “Advances in Micro Ultrasonic Assisted Lapping of Microstructures in Hard–brittle Materials: A Bbrief Review and Outlook”, International Journal of Machine Tools and Manufacture, Vol. 45, 2005, pp. 881-890.

[3]  Egashira, K., Masuzawa, T., “Micro Ultrasonic Machining by the Application of Workpiece Vibration”, CIRP Annals, Vol. 48, 1999, pp. 131-134.

[4]  Masuzawa, T., “State of the Art of Micromachining”, Annals of the CIRP, Vol. 49, 2000, pp. 473-488.

[5]  Medis, P. S., Henderson, H. T., “Micromachining Using Ultrasonic Impact Grinding”, Journal of Micromechanics and Microengineering, Vol. 15, 2005, pp. 1556-1559.

[6]  Hu, X., Yu, Z., and Rajurkar, K. P., “State-of-the-art Review of Micro Ultrasonic Machining”, in Proceedings of the International Conference on Manufacturing Science and Engineering, 2006, pp. 1017-1024.

[7]  Rajurkar, K. P., Levy, G., Malshe, A., Sundaram M. M., McGeough, J., Hu, X., Resnick, R., DeSilva, A., “Micro and Nano Machining by Electro-Physical and Chemical Processes”, Annals of the CIRP, Vol. 55, 2006, pp. 643-666.

[8]  Hu, X., “Mechanism, Characteristics and Modeling of Micro Ultrasonic Machining”, PhD, The University of Nebraska - Lincoln, USA, Nebraska, 2007.

[9]  Zhang, C., Brinksmeier, E., and Rentsch, R., “Micro-USAL Technique for the Manufacture of High Quality Microstructures in Brittle Materials”, Precision Engineering, Vol. 30, 2006, pp. 362-372.

[10]   Masuzawa, T., Tönshoff, H. K., “Three-Dimensional Micromachining by Machine Tools”, CIRP Annals - Manufacturing Technology, Vol. 46, 1997, pp. 621-628.

[11]Yu, Z., Hu, X., and Rajurkar, K. P., “Study of Micro Ultrasonic Machining of Silicon”, Proceedings of 2005 ASME International Mechanical Engineering Congress and Exposition, Orlando, Florida, USA, 2005, pp. 1063-1070.

[12]Yu, Z., Hu, X., and Rajurkar, K. P., “Influence of Debris Accumulation on Material Removal and Surface Roughness in Micro Ultrasonic Machining of Silicon”, CIRP Annals - Manufacturing Technology, Vol. 55, 2006, pp. 201-204.

[13]Kuriyagawa, T., Shirosawa, T., Saito, O., and Syoji, K., “Development of Micro Ultraonic Abrasive Machining System”, JSME International Journal, Vol. 45, 2002, p. 8.

[14]Hoover, D., Kremer, D., “Milli-Newton Force Measurement and Control for Micro Ultrasonic Machining”, in Proceedings of the 15th International Symposium on Electromachining, K. P. Rajurkar, R. L. Resnick, and M. M. Sundaram, Eds., ed Pittsburgh, PA, USA, 2007, pp. 375-379.

[15]Hu, X., Yu, Z., and Rajurkar, K. P., “Experimental Study of Micro Ultrasonic Vibration Machining”, Processing and Fabrication of Advanced Materials XIV With Frontiers in Materials Science 2005: Innovative Materials and Manufacturing Techniques Pittsburgh, Pennsylvania, USA, 2005, pp. 197-210.