AbstractA cold magnetized plasma sheath is considered to examine the gas pressure effect on the sheath dynamics. A fluid model is used to describe the plasma sheath dynamic. The governing fluid equations in the plasma are solved from plasma center to the target using the finite difference method and some convenient initial and boundary conditions at the plasma center and target. It is found that, the ion-neutral collision has significant effect on the dynamic characteristics of the high-voltage sheath in the plasma immersion ion implantation (PIII). It means that, the temporal profile of the ion dose on the target and sheath width are decreased by increasing the gas pressure. Also, the gas pressure substantially diminishes the temporal psychograph of ion incident angle on the target. Manuscript profile

AbstractIn order to study the ion temperature effect on the space-charge structure and the plasma variables on the wall, the ion thermal force has been added to the ion motion equation in the plasma fluidal model. In the eigenvalue problem of plasma, the plasma equations are numerically solved in a whole area from the plasma center to the wall and it is displayed that the ion temperature has significant effects on the plasma structure and floating variables. However, the fluidal theory of plasmas introduces a singular point among the space charge of plasma boundary layer if the static pressure and the inertial mass of the thermal ions are taken into account at the same time. Finding a full numerical solution for the thermal plasma equations needs to cross the singular point. The singular point and how crossing the point will be depicted too. Manuscript profile