investigating pressure applied in surface vertically that is done by use of mechanical procedures isn’t efficient to measure pressure applied in inner surface of reservoir or pipes having gas due to entering pressure into whole walls and different surfaces. So, in order to measure this kind of pressure, several studies were conducted in past decades and also various procedures were proposed that some of them had a mistake, benefits and faults. At this paper, we designed and simulated structure titled as Piezo-resistor manometer by following proposed problem and employing Piezo's structures, then we investigated the effects of movement of this structure's probe to improve and linearize its output. The results showed that, in addition to physical parameters like screen dimensions of manometer, county leaver length, apparent shape, probe dimensions and quality of each probe, load resistance has main effect on linearization of probe performance considering output voltage too. Manuscript profile

The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applying voltage into senseor in p-type piezoresistors located on the diaphragm surface. The diaphragm that is 10 „m thickexhibits a maximum deflection of 3.74 „m using the designed model, which has a relative difference of 5.14 and 0.92% with respect to the comsol model, respectively. The maximum sensitivity and normal stress calculated using the this model are 1.64 mV/V/kPa and 102.1 MPa, respectively. The results of the polynomial model agree well with the Timoshenko model and FEM model for small deflections. In addition, the designed model can be easily used to predict the deflection, normal stress, electric response and sensitivity of a piezoresistive pressure microsensor with a square-shaped diaphragm under small deflections. Manuscript profile