Design and Simulation of piezorestive pressure sensor for AFM Probe the displacement measurement

Subject Areas : journal of Artificial Intelligence in Electrical Engineering

Hamsa Kamali ¹ , Asghar charmin ²

1 - Electrical Engineering, Islamic Azad University, Ahar Branch, Ahar, Iran
2 - Electrical Engineering, Islamic Azad University, Ahar Branch, Ahar, Iran

Received: 2017-01-04 Accepted : 2017-04-05 Published : 2017-06-01

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