Effects of the Residual Stress and Bias Voltage on the Phase Diagram and Frequency Response of a Capacitive Micro-Structure

Subject Areas : Engineering

S Ahouighazvin ¹ ( Department of Mechanical Engineering, Khoy Branch, Islamic Azad University )
M Mohamadifar ² ( Department of Mechanical Engineering, Khoy Branch, Islamic Azad University, )
P Mahmoudi ³ ( Department of Mechanical Engineering, Khoy Branch, Islamic Azad University, )

Received: 2011-06-18 Accepted : 2011-07-30 Published : 2011-09-30

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References:

[1] Basso M., Giarre L., Dahleh M., Mezic I., 1998, Numerical analysis of complex dynamics in atomic force microscopes, Proceedings of the IEEE International Conference on Control Applications, Trieste, Italy, 1-4 September: 1026-1030.

[2] Nabian A., Rezazadeh Gh., Haddad-Derafshi M., Tahmasebi A., 2008, Mechanical behavior of a circular micro plate subjected to uniform hydrostatic and non-uniform electrostatic pressure, Micro System Technologies 14: 235-240.

[3] Senturia S., 2001, Micro System Design, Kluwer, Norwell, MA, USA.

[4] Rezazadeh Gh., Sadeghian H., Abbaspour E., 2008, A comprehensive model to study nonlinear behaviour of multilayered micro beam switches, Micro System Technologies, 14(1): 143.

[5] Abdel-Rahman E.M., Younis M.I., Nayfeh A.H., 2002, Characterization of the mechanical behavior of an electrically actuated micro beam, Journal of Micromechanical Micro engineering 12: 759-766.

[6] Letter to Editor, 2008, A distributed MEMS phase shifter on a low-resistivity silicon substrate, Sensors and Actuators A 144: 207-212.

[7] Barker N.S., Rebeiz G.M., 1998, Distributed MEMS true-time delay phase shifters and wide band switches, IEEE Transactions on Microwave Theory and Techniques 46 (11): 1881-1890.

[8] Hayden J.S., Rebeiz G.M., 2000, 2-Bit MEMS distributed X-band phase shifters, IEEE Microwave Guided Wave Lett 10 (12): 540-542.

[9] Hayden J.S., Malczewski A., Kleber J., Goldsmith C.L., Rebeiz G.M., 2001, 2 and 4-Bit DC 18 GHz micro strip MEMS distributed phase shifters, in: IEEE MTT-S International Microwave Symposium Digest, Phoenix, USA , 219-222.

[10] Palei W., Liu A.Q., Yu A.B., Alphones A., Lee Y.H., 2005, Optimization of design and fabrication for micro machined true time delay (TTD) phase shifters., Sensors and Actuators A 119:446-454.

[11] Ngoi B.K.A.,Venkatakrishnan K., Sivakumar N.R., Bo T., 2001 , Instantaneous phase shifting arrangement for micro surface profiling of flat surfaces, Optics Communications 190: 109-116.

[12] Smythe R., More R., 1984, Instantaneous phase measuring interferometry, Optical Engineering 23(4): 361-365.

[13] Mukherjee T., Fedder G.K., White J., 2000, Emerging simulation approaches for micro machined devices, IEEE Transactions on Computer-aided Design of Integrated Circuits and Systems 19: 1572-1589.

[14] Senturia S.D., Aluru N., White J., 1997, Simulating the behavior of MEMS devices, IEEE Comput Sci Eng 4(1): 30-43.

[15] Rezazadeh Gh., Fathalilou M., Sadeghi M., 2011, Pull-in voltage of electro statically-actuated micro beams in terms of lumped model pull-in voltage using novel design corrective coefficients, Sensing and Imaging: An International Journal 12(3):117-131.

[16] Gupta R.K., 1997, Electrostatic pull-in test structure design for in-situ mechanical property measurement of micro electromechanical systems (MEMS), Ph.D. dissertation, MIT, Cambridge, MA, 10-27.

[17] Rezazadeh Gh., Tahmasebi A., Zubtsov M., 2006, Application of piezoelectric layers in electrostatic mem actuators: Controlling of pull-in voltage, Micro System Technologies 12(12): 1163-1170.

[18] Nayfeh H., 1979, Mook Nonlinear Oscillations, Wiley, New York.

[19] Mirovitch L., 2001, Fundamentals of Vibrations, Mc Graw Hill Press, International Edition.

[20] Rezazadeh Gh., Fathalilou M., Shirazi K., Talebian S., 2009, A novel relation between pull-in voltage of the lumped and distributed models in electro statically-actuated micro beams, MEMSTECH, April 22-24, Polyana-Svalyava (Zakarpattya), Ukraine, 31-35.

[21] Hung E.S., Senturia S. D., 1999, Generating efficient dynamical models for micro electromechanical systems from a few finite-element simulation runs, Journal of Micro Electromechanical Systems 8: 280-289.

[22] Younis M.I., Abdel-Rahman E. M., Nayfeh A., 2003, A reduced-order model for electrically actuated micro beam-based MEMS, Journal of Micro Electromechanical Systems 12(5): 672-680.