Effects of the Residual Stress and Bias Voltage on the Phase Diagram and Frequency Response of a Capacitive Micro-Structure

Subject Areas : Engineering

S Ahouighazvin ¹ , M Mohamadifar ² , P Mahmoudi ³

1 - Department of Mechanical Engineering, Khoy Branch, Islamic Azad University
2 - Department of Mechanical Engineering, Khoy Branch, Islamic Azad University,
3 - Department of Mechanical Engineering, Khoy Branch, Islamic Azad University,

Received: 2011-06-18 Accepted : 2011-07-30 Published : 2011-09-30

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References:

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