Study on the Pull-In Instability of Gold Micro-Switches Using Variable Length Scale Parameter

Subject Areas : Engineering

M  Fathalilou ¹ (Department of Mechanical Engineering, Khoy Branch, Islamic Azad University)
M  Sadeghi ² (Department of Mechanical Engineering, University of Tabriz)
G  Rezazadeh ³ (Department of Mechanical Engineering, Khoy Branch, Islamic Azad University)
M  Jalilpour ⁴ (Department of Mechanical Engineering, Khoy Branch, Islamic Azad University)
A  Naghilou ⁵ (Department of Mechanical Engineering, Khoy Branch, Islamic Azad University)
S  Ahouighazvin ⁶ (Department of Mechanical Engineering, Khoy Branch, Islamic Azad University)

Received: 2011-04-01 Accepted : 2011-05-29 Published : 2011-06-30

Keywords:

References:

[1] Madou M., 2002, Fundamentals of Microfabrication, CRC Press, NewYork, USA, p. 497.

[2] Holliday R., Goodman P., 2002, Going for the gold, IEE Review, 48: 15-19.

[3] Knarr R.F., Quon R.A., 1998, Direct force measurements at the smooth gold/mica interface, Langmuir 14(22): 6414-6418.

[4] Caol Y., Nankivil D.D., Allameh S., Soboyejo W.O., 2007, Mechanical properties of au films on silicon substrates, Materials and Manufacturing Processes 22: 187-194.

[5] Younis M.I., Abdel-Rahman E.M., Nayfeh A., 2003, A reduced-order model for electrically actuated microbeam-based MEMS, Journal of Microelectromechanical Systems 12(5): 672-680.

[6] Sadeghian H., Rezazadeh G., Osterberg P.M., 2007, Application of the generalized differential quadrature method to the study of pull-in phenomena of MEMS switches, Journal of Microelectromechanical Systems 16 (6): 1334-1340.

[7] Osterberg P.M., Senturia S.D., 1997, M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures, Journal of Microelectromechanical Systems 6: 107-118.

[8] Rezazadeh G., Fathalilou M., Shabani R., 2009, Static and dynamic stabilities of a microbeam actuated by a piezoelectric voltage, Journal of Microsystem Technologies 15:1785-1791.

[9] Papargyri-Beskou S., Tsepoura K.G., Polyzos D., Beskos D.E., 2003, Bending and stability analysis of gradient elastic beams, International Journal of solids and structures 40: 385-400.

[10] Lazopoulos K.A., Lazopoulos A.K., 2010, Bending and buckling of thin strain gradient elastic beams, European Journal of mechanics A/solids 29: 837-843.

[11] Asghari M., Ahmadian M.T., Kahrobaiyan M.H., Rahaeifard M., 2010, On the size-dependent behavior of functionally graded micro-beams, Materials and Design 31: 2324-2329.

[12] Park S.K., Gao X.L., 2006, Bernoulli-Euler beam model based on a modified couple stress theory, Journal of Micromechanics and Microengineering 16: 2355-2359.

[13] Fu Y., Zhang J., 2011, Size-dependent pull-in phenomena in electrically actuated nanobeams incorporating surface energies, Applied Mathematical Modelling 35: 941-951.

[14] Shengli K., Shenjie Z., Zhifeng N., Kai W., 2009, Static and dynamic analysis of micro beams based on strain gradient elasticity theory, Journal of Engineering Society 47: 487-498.

[15] Lam D.C.C., Chong A.C.M., 1999, Indentation model and strain gradient plasticity law for glassy polymers, Journal of Material Research 14: 3784-3788.

[16] Park S.K., Gao X.L., 2006, Bernoulli-Euler beam model based on a modified couple stress theory, Journal of Micromechanics and Microengineering 16(11): 2355-2359.

[17] Shengli K., Shenjie Z., Nie Z., Wang K., 2008, The size-dependent natural frequency of Bernoulli–Euler micro-beams, Journal of Engineering Society 46: 427-437.

[18] Yang F., Chong A.C.M., Lam D.C.C., Tong P., 2002, Couple stress based strain gradient theory for elasticity, International Journal of Solids and Structure 39: 2731-2743.

[19] Park S.K., Gao X.L., 2006, Bernoulli-Euler beam model based on a modified couple stress theory, Journal of Micromechanics and Microengineering 16(11): 2355-23559.

[20] Zong Z., Soboyejo W.O., 2005, Indentation size effects in face centered cubic single crystal thin films, Materials Science and Engineering A 404(1–2): 281-290.

[21] Zhang Y., Zhao Y., 2010, Numerical and analytical study on the pull-in instability of micro- structure under electrostatic loading, Journal of Sensors Actuators A: Physics 127: 366-367.

[22] Samaali H., Najar F., Choura S., Nayfeh A., Masmoudi M., 2011, A double microbeam MEMS ohmic switch for RF-applications with low actuation voltage, Nonlinear Dynamics 63: 719-734.

[23] Nayfeh A., Younis M.I., 2005, Dynamics of MEMS resonators under superharmonic and subharmonic excitations, Journal of Micromechanics and Microengineering 15: 1840-1847.

[24] Younis M.I., Miles R., Jordy D.L., 2006, Investigation of the response of microstructures under the combined effect of mechanical shock and electrostatic forces, Journal of Micromechanics and Microengineering 16: 2463-2474.

[25] Ballestra A., Brusa E., Pasquale G., Munteanu G., Soma A., 2010, FEM modelling and experimental characterization of microbeams in presence of residual stress, Analog Integrated Circuites Signals Process 63: 477-488.

[26] Vummidia K., Khater M., Abdel-Rahman E., Nayfeh A., Raman S., 2009, Dynamic pull-in of shunt capacitive MEMS switches, Procedia Chemistry 1: 622-625.

[27] Pacheco S.P., Katehi L.P.B., Nguyen C.T.C, 2000, Design of low actuation voltage RF MEMS switch, IEEE MTT-S Digest 1: 165-168.

[28] Son S., Kim J., Kwon D., 2005, Tensile properties and fatigue crack growth in LIGA nickel MEMS structures, Materials Science and Engineering A 406: 274-278.

[29] Nix W.D., Gao H., 1998, Indentation size effects in crystalline materials: a low for strain gradient plasticity, Journal of Mechanical and Physical Solids 46: 411-425.

[30] Zong Z., Soboyejo W., 2005, Indentation size effects in face centered cubic single crystal thin films, Materials Science and Engineering A 404: 281-290.

[31] Rezazadeh G., Fathalilou M., Shabani R., Tarverdilou S., Talebian S., 2009, Dynamic characteristics and forced response of an electrostatically actuated microbeam subjected to fluid loading, Journal of Microsystem Technologies 15: 1355-1363.

[32] Hung E.S, Senturia S.D., 1999, Generating efficient dynamical models for Microelectromechanical systems from a few finite-element simulation runs, Journal of Microelectromechanical Systems 8: 280-289.