Design and simulation of novel RF MEMS cantilever switch with low actuation voltage

Subject Areas : Majlesi Journal of Telecommunication Devices

Bahram A. Ganji ¹ , Khadijeh Khodadady ²

1 - Department of Electrical Engineering, Babol Noshirvani University of Technology, Babol, Iran
2 - Department of Electrical Engineering, Babol Noshirvani University of Technology, Babol, Iran

Received: 2014-12-06 Accepted : 2014-12-16 Published : 2014-12-01

Keywords:

References:

[1] H.U.Rahman and R.Ramer .(2009(.Three-Bar Novel RF MEMS Switches. IEEE.E. H. Miller, “A note on reflector arrays,” IEEE Trans. Antennas Propagat., to be published.

[2] S.C.Saha، U.Hanke،G. U. Jensen and T.Sather. (2009). “Modelingmof Spring Constant and Pull-down Voltage of Non uniform RF MEMS Cantilever.’’ IEEE http://www.halcyon.com/pub/journals/21ps03-vidmar

[3] H. U.Rahman، T. Hesketh and R.Ramer . (2008). “Low Actuation Voltage RF MEMS Switch with Novel Beam Design Magnetism” Interernational Conference on Emerging Technologies IEEE-ICET ،pp18-19،Octobre.

[4] H.U.Rahman and K Y Chan and R Ramer. ( 2010). “Cantilever beam designs for RF MEMS switches.’’ J. Micromech. Microeng. 20 (2010) 075042 (12pp). IOP

[5] J.Kim، S.Kwon،H.Jeong، S.Lee،I.Song and B.Ju. (2009). “A stiff and flat membrane operated DC contact type RF MEMS switch with low actuation voltage.’’ Sensor and Actuators A، 153،pp 114-119.

[6] H.C.Lee، J.Y.Park ، and J.U.Bu. (2005). “Piezoelectrically Actuated RF MEMS DS Contact Switches with low Voltage Operation.’’ Mi، Ficrowave and Wireless Components Letters ،vol.15،No.4،Aprel. IEEE, 2005.

[7] Gh.Moloudian and M.A.Pirbonyeh. (2014). “Simulation of Cantilever RF MEMS switch,” International Research Jounal of Basic Sciences، vol.8(4)،PP 442-446.

[8] Sarkar Suparana and Dr. A. Vimala juliet. “Design of low voltage RF MEMS capacitive switch with low spring constant’’. ISSN، Vol. 3،Issue 4.2320-3765, 2014.

[9] Bagher Fathi Mohammad، Veladati Hadi، Golmohammadi saed. “A new electrostatically actuated low voltage RF MEMS switch.’’ European Scientific Journal November 2013 edition vol.9، No.33 ISSN: 1857 – 7881 (Print) e - ISSN 1857- 7431, 2013.

[10] M.Rebeiz. “RF MEMS Theory Design and Technology’’, 2003.

[11] B.A Ganji, “design and fabrication of small size and high sensitivity MEMS capacitive microphone”, Ph.D. dissertation. Dept Univ. UKM, 2007.

[12] B. A. Ganji and B. Y. MAjlis, “Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm’’. Sensors and Actuators A 149. pp. 29–37. 2009.

[13] B. A. Ganji and B. Y. MAjlis,(2009). “design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm’’. Micro/NANOlith MEMS MOEMS. pp.021112 (1-7).

[14] B. A. Ganji and B. Y. MAjlis,(2008) “Analytical Analysis of Flat and Corrugated Membranes for MEMS Capacitive Sensors’’ International journal of Nonlinear Dynamics in Engineering and Sciences. 1:1, pp. 47-57.

[15] B. A. Ganji and B. Y. MAjlis,(2009) “Fabrication and Characterization of a New MEMS Capacitive Microphone using Perforated Diaphrag’’ International journal of Nonlinear Dynamics in Engineering and Sciences. 1:1, pp. 47-57.