Characterization of DLC Thin Films Deposited by DC-Pulsed PACVD using Methane Precursor
Subject Areas : micro and nano mechanics
seyed mohammad mahdi shafiei
1
(
Department of Mechanical Engineering,
West Tehran branch, Islamic Azad University, Tehran, Iran
Department of Mechanical Engineering,
Roudehen branch, Islamic Azad University, Roudehen, Iran
)
Hamed raeiesifard
2
(
Department of Mechanical Engineering,
West Tehran branch, Islamic Azad University, Tehran, Iran
E-mail: raeiesifard.ha@wtiau.ac.ir
)
Keywords:
Abstract :