Characterization of DLC Thin Films Deposited by DC-Pulsed PACVD using Methane Precursor
Subject Areas :
micro and nano mechanics
seyed mohammad mahdi shafiei
1
,
Hamed raeiesifard
2
1 - Department of Mechanical Engineering,
West Tehran branch, Islamic Azad University, Tehran, Iran
Department of Mechanical Engineering,
Roudehen branch, Islamic Azad University, Roudehen, Iran
2 - Department of Mechanical Engineering,
West Tehran branch, Islamic Azad University, Tehran, Iran
E-mail: raeiesifard.ha@wtiau.ac.ir
Received: 2021-03-28
Accepted : 2021-09-21
Published : 2022-03-01
Keywords:
References:
Chintaiah, N., Ravi kumar, S. T., International Journal of Science, Engineering and Technology Research (IJSETR), Vol. 7, 2018, pp. 2278 -7798.
Casati, R., Vedani, M., A Review, Vol. 1, 2014, pp. 65-83.
Rie, K. T., Gebauer, A., Woehle, J., Tonshoff, H. K., and Blawit, C., Surf. Coat. Technol., Vol.74-75, 1995, pp. 375–381.
Hedenqvist, P., Olsson, M., Wallen, P., Kassman, A., Hogmark, S., and Jacobson, S., Surf. Coat. Technol. Vol. 41, 1990, pp. 243–256.
Sundgren, J. E., Thin Solid Films.Vol. 128, 1985, pp. 21–44.
Rie, K. T., Gebauer, A., and Woehle, J., Surf. Coat. Technol., Vol. 60, 1993, pp. 385–388.
Ishii, Y., Ohtsu, H., Adachi, T., Ichimura, H., and Kobayashi, K., Surf. Coat. Technol., Vol. 4, 1991, pp. 279–283.
Cullity, B. D., Elements of X-Ray Diffraction, 2nd ed, Addison Wesley., 1978, pp. 154-196.
Niederhofer, A., Bolom, T., Nesladek, P., Moto, K., Eggs, Ch., Patil, D. S., and Veprek, S., J. Surf. Coat. Technol., Vol. 183, 2001, pp. 146–147.
Tadahiro, W., Materials Science Forum, Vol. 638-642, 2010, pp. 368-373.
William, D., Melo, S., José Rubens, G. C., and Vladimir, T. A., J. Materials Research. Vol. 16, No. 3, 2013, pp. 603-608.
Yuanbing, L., Nan, L., Guozhi, R., Jianwei, L., and Xiaohui, L., Materials and Design., Vol. 28, 2007, pp. 969–972.
Jones, B. J., Mahendran, A., Anson, A. W., Reynold, A. J., and Bulpett, R., J. Frank. Diamond and Related Materials, Vol. 19, 2010, pp. 685.
Vinod Babu, C., Yaradi, M., and Teja Thammineni, D., Materials Science and Engineering, Vol. 390, 2018, pp. 012079.
Zangh, H., Yan Tang, S., Raremetals., Vol. 29, 2010, pp. 528.
Kenneth, H., Helena, R., Anssi, L., Kim, W., Sture, H., Staffan, J., Urban, W., Souza, M., and Per, S., Wear, Vol. 267, 2009, pp. 2142–2156.
