Micro Electropolishing of the MEMS Metallic Structures Fabricated by the Micro WEDM Process

Subject Areas : meso/micro/nano fabrication

Mohammad Tahmasebipour ¹ , Younes Tahmasebipour ² , Mahya Boujari Aliabadi ³ , Shadi Ebrahimi ⁴

1 - Faculty of New sciences and Technologies, University of Tehran, Tehran, 14395 -1561, Iran Micro/Nanofabrication Technologies Lab, Faculty of New Sciences and Technologies, University of Tehran, Tehran, 14395 -1561, Iran
2 - Micro/Nanofabrication Technologies Lab, Faculty of New Sciences and Technologies, University of Tehran, Tehran, 14395 -1561, Iran
3 - Faculty of New sciences and Technologies, University of Tehran, Tehran, 14395 -1561, Iran Micro/Nanofabrication Technologies Lab, Faculty of New Sciences and Technologies, University of Tehran, Tehran, 14395 -1561, Iran
4 - Faculty of New sciences and Technologies, University of Tehran, Tehran, 14395 -1561, Iran Micro/Nanofabrication Technologies Lab, Faculty of New Sciences and Technologies, University of Tehran, Tehran, 14395 -1561, Iran

Received: 2021-04-22 Accepted : 2021-08-14 Published : 2022-03-01

Keywords:

References:

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