Memory effect in silicon nitride deposition using ICPCVD technique
Subject Areas : Journal of Theoretical and Applied PhysicsSunil Kumar 1 , D. S. Rawal 2 , Hitendra K. Malik 3 , Rajeev Sanwal 4 , S. A. Khan 5 , Seema Vinayak 6
1 - Solid State Physics Laboratory
2 - Solid State Physics Laboratory
3 - Department of Physics, Indian Institute of Technology Delhi
4 - Solid State Physics Laboratory
5 - Interstate University Accelerator Center
6 - Solid State Physics Laboratory
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