The experimental approach into the influence of external inductance on the discharge characteristic of HiPIMS

Subject Areas : Journal of Theoretical and Applied Physics

Saeed Ghasemi ¹ , Pourya Seyfi ² , Alireza Farhadizadeh ³ , Hamid Ghomi ⁴

1 - Laser and Plasma Research Institute, Shahid Beheshti University
2 - Laser and Plasma Research Institute, Shahid Beheshti University
3 - Laser and Plasma Research Institute, Shahid Beheshti University
4 - Laser and Plasma Research Institute, Shahid Beheshti University

Accepted : 2019-12-01 Published : 2019-12-01

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