Structural and morphological properties of ITO thin films grown by magnetron sputtering

Subject Areas : Journal of Theoretical and Applied Physics

Z. Ghorannevis ¹ , E. Akbarnejad ² , M. Ghoranneviss ³

1 - Department of Physics, Karaj Branch, Islamic Azad University
2 - Plasma Physics Research Centre, Science and Research Branch, Islamic Azad University
3 - Plasma Physics Research Centre, Science and Research Branch, Islamic Azad University

Published : 2015-12-01

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