Optical imaging and magnetic field simulation of a DC circular planar magnetron sputtering discharge

Subject Areas : Journal of Theoretical and Applied Physics

Ahmad Rastkar ¹ , Ali Reza Niknam ² , Mostafa Salahshoor ³

1 - Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran
2 - Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran
3 - School of Physics, Iran University of Science and Technology, Tehran, Iran

Received: 2023-02-20 Accepted : 2023-05-10 Published : 2023-09-01

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