موج‌بر نواری فلز-عایق-فلز عمودی مبتنی بر ساختار سیلیکون بر روی عایق
محورهای موضوعی : مهندسی برق الکترونیک
وحید صادق زاده مرقی
1
,
محمود نیکو فرد
2
,
مهدی اسلامی
3
,
سید حسین پیشگر کومله
4
1 - دانشکده مهندسی برق، واحد تهران غرب، دانشگاه آزاد اسلامی، تهران، ایران
2 - دانشکده مهندسی برق و کامپیوتر، دانشگاه کاشان، کاشان، ایران
3 - دانشکده مهندسی برق، واحد تهران غرب، دانشگاه آزاد اسلامی، تهران، ایران
4 - دانشکده مهندسی برق، واحد تهران غرب، دانشگاه آزاد اسلامی، تهران، ایران
کلید واژه: تمرکز در ابعاد نانو, مدارهای یکپارچه فوتونیک, سیلیکون بر روی عایق (SOI), موج‌بر نواری فلز-عایق-فلز (MIM) عمودی, پلاسمونیک, خواص انتشار,
چکیده مقاله :
این مقاله یک موج‌بر پلاسمونیک نواری بسیار فشرده جدید فلز-عایق-فلز (MIM) بر روی ساختار سیلیکون بر روی عایق (SOI) پیشنهاد می‌کند. ساختار موج‌بر می‌تواند به‌طور مؤثر پلاریتون پلاسمون های سطحی (SPPs) را در یک لایه نازک SiO2 با ضریب شکست کم در پنجره طول‌موج نوری 1550 نانومتر منتشر کند. پارامترهای اصلی شامل، ضریب شکست مؤثر، طول انتشار، ضریب تحدید و ناحیه حالت مؤثر برای موج‌بر پیشنهادی با پهناهای مختلف موج‌بر محاسبه شده است. نتایج شبیه‌سازی با موج‌بر پلاسمونیک MIM افقی قابل‌مقایسه می باشد. ساختار پیشنهادی می‌تواند به‌صورت یکپارچه با ادوات مبتنی برSOI عایقی مرسوم و پلاسمونیکی ترکیبی مجتمع سازی شده و پتانسیل متمرکز کردن نور، در ابعاد نانو را دارد.
This paper proposes a new ultra-compact strip metal-insulator-metal (MIM) plasmonic waveguide on a silicon-on-insulator (SOI) platform. The waveguide structure can efficiently propagate surface plasmon polaritons (SPPs) within a thin low-index SiO2 layer at an optical wavelength window of 1550 nm. The main parameters of effective refractive index, propagation length, confinement factor, and effective mode area were determined for the proposed waveguide with different waveguide widths. The simulation results were comparable with the in-plane MIM plasmonic waveguide. The proposed layer stack could be monolithically integrated with conventional and hybrid plasmonic SOI-based devices and has the potential of focusing light to nanoscale dimensions.
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