Design and analysis of a MOEMS accelerometer using all-dielectric meta-materials based on Fano Resonance

Subject Areas : Electrical Engineering

Mohammad Reza Karimipour ¹ , Azadeh Naeimi ² , Nader Javadifar ³ , Mohammad Bagher Nasrollahnejad ⁴

1 - Department of Electrical Engineering, Aliabad Katoul Branch, ‎Islamic Azad University, Aliabad Katoul, Iran.‎
2 - Department of Physics , Aliabad Katoul Branch;Islamic Azad University, Aliabad Katoul ,Iran
3 - Department of Electrical Engineering , Aliabad Katoul Branch;Islamic Azad University, Aliabad Katoul ,Iran
4 - Department of Electrical Engineering, Gorgan Branch, Islamic Azad ‎University, Gorgan, Iran.‎

Received: 2024-05-27 Accepted : 2024-07-11 Published : 2024-07-16

Keywords: Accelerometer, MOEMS, Meta-material, Fano resonance, wavelength modulation.,

Abstract :

This paper introduces a novel micro-opto-electro-mechanical-systems accelerometer that leverages a tunable all-dielectric meta-material. The device operates by modulating the wavelength of incident light-wave. The utilized metamaterial takes advantage of highly tunable ultra-sharp Fano resonance peaks to create a high-performance accelerometer, offering enhanced sensitivity and resolution. Simulation results indicate the functional attributes of the proposed sensor: a mechanical sensitivity of 0.13 nm/g, a linear measurement range spanning ±38.4 g, and an overall sensitivity of 1.17 nm/g. These characteristics render the device applicable across a broad spectrum of uses, from consumer electronics to inertial navigation. This paper introduces a novel micro-opto-electro-mechanical-systems accelerometer that leverages a tunable all-dielectric meta-material. The device operates by modulating the wavelength of incident light-wave. The utilized metamaterial takes advantage of highly tunable ultra-sharp Fano resonance peaks to create a high-performance accelerometer, offering enhanced sensitivity and resolution. Simulation results indicate the functional attributes of the proposed sensor: a mechanical sensitivity of 0.13 nm/g, a linear measurement range spanning ±38.4 g, and an overall sensitivity of 1.17 nm/g. These characteristics render the device applicable across a broad spectrum of uses, from consumer electronics to inertial navigation.

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