AbstractIn this work, a xenon-filled quartz coaxial dielectric barrier discharge (DBD) tube (ID 6 mm, OD 12 mm) at 400-mbar pressure has been studied at different operating conditions. High-frequency sinusoidal and unipolar pulse-like voltages are applied at the discharge electrodes for the generation of micro-discharge plasma. Visual images of the discharge and the electrical waveform confirm the diffused-type discharge. The mechanism that is involved in the ignition, development and extinction of DBDs is quantitatively explained by dynamic processes in the discharge. An equivalent electrical model representing the DBD phenomenon has also been used to validate the characteristic discharge parameters. The relative intensity analysis of the Xe continuum peak at wavelength 172 nm in the optical emission spectra of the vacuum ultraviolet region has been carried out for different operating conditions. Approximately three times increment in the radiation is observed in pulse excitation over sinusoidal excitation. It infers that the pulsed excitation of DBD sources is advantageous for excimer light sources. تفاصيل المقالة

AbstractThis paper reports the plasma discharge analysis of a dielectric barrier discharge (DBD) source. Helium is used as a working gas. The analysis is performed at fixed working pressure and operating frequency. The investigations are carried out using sinusoidal supply for the generation of discharges where two current pulses have been observed with different polarities in one period. A homogeneous type of discharge has been observed for different operating conditions in this DBD source. Since in situ diagnostics are not possible due to the small geometries in the used DBD source, the electrical measurements and spectroscopic analysis of the discharge have been performed to analyse the plasma discharge. The electrical analysis has been carried out using equivalent electrical circuit model. The plasma density and temperature within the discharge have been estimated using line ratio technique of the observed visible neutral helium lines. The estimated electron plasma density is found to be in close proximity with the plasma simulation code ‘OOPIC Pro’. تفاصيل المقالة