The Micro wire electrical discharge machining (Micro wire-EDM) process is a modern machining process with various applications in manufacturing micro-parts. The recast layer remaining on the machined surfaces is an inevitable complication of this process. This layer can subsequently affect the machined parts performance. To optimize the recast layer in the micro wire-EDM of the molybdenum microparts, effect of the process parameters on the distribution amplitude of the recast layer was investigated using the Taguchi method. The obtained results showed that the optimal levels of the micro wire-EDM process parameters for achieving the optimal distribution amplitude of the recast layer are as follows: spark pulse-on time of 0.2 μs, cutting speed of 7 mm/min, process voltage of 17 V, and wire tension of 0.45 kg. Also the importance order of the effect of the process parameters on the distribution amplitude of recast layer is as follows: spark pulse-on time, process voltage, cutting speed, and wire tension. تفاصيل المقالة

With the development of micro and nanotechnology, machining methods at micro and nanoscale have now become interesting research topics. One of the recently-proposed methods for sub-micron machining, especially nanomachining, is dynamic plowing lithography (DPL) method. In this method an oscillating tip is used for machining soft materials such as polymers. The geometry of the oscillating beam and its vibrational properties are the most important parameters in this nanomachining process. In this study, effects of the AFM beam geometry on its stiffness coefficient, resonant frequency, beam stability, and the maximum stress created in the beam structure were investigated for 12 different general shapes using the finite element method. The obtained results indicate that circular and square membranes are the most favourable AFM cantilever geometries because these structures provide higher machining force and speed; while for noisy conditions and environments, straight and V-shaped beams are recommended (because of their higher stability factor) for the DPL nanomachining process. تفاصيل المقالة

Metal-based microelectromechanical systems are widely used in applications such as micro-energy harvesters, micro-heat exchangers and micro-electromagnetic that require high strength and flexibility. In the fabrication of such systems, micro wire electrical discharge machining (MicroWEDM) is majorly used. This paper studies the effect of the MicroWEDM process parameters on the dimensional deviation of machined MEMS structures including microcantilevers and micro-beams using the Taguchi method. Using optimal levels of the parameters including pulse duration (0.8 µs), cutting speed (8.4 mm/min), voltage (17 V) and wire tension (0.5 kg), the dimensional deviation is reduced about 8.65 times compared with the average of experiments results. The order of effect importance of the process parameters on the dimensional deviation of microstructures obtained by the ANOVA analysis of S/N ratios is as follows: pulse duration, wire tension, process voltage and cutting speed. Dimensional deviation of the micro-features was reduced to 1 μm using the optimal levels of the process parameters. تفاصيل المقالة

In this study, the micro electro-polishing method was employed to improve the surface quality of microbeams machined by the micro WEDM method and to remove the recast layer. This approach changes the dimensions of the microbeams, as a result of the electrochemical corrosion, in addition to the elimination of the recast layer. To diminish the impact of this process on the dimensional deviation of the fabricated microbeams, the influence of the micro electro-polishing process parameters such as voltage, duration, cathode diameter, and electrolyte composition on the dimensional deviation of microbeams was studied using the Taguchi method. The optimum values of process parameters were determined by the S/N ratios analysis, and the order of parameters importance was determined through analysis of variance of the S/N ratios. It was found that the optimal levels of the process parameters are voltage of 2 V, process duration of 20 s, cathode diameter of 50 mm, and electrolyte composition of 25-5-40 ml (sulfuric-phosphoric-water) within the range of experiments. By using the optimum values of the parameters, the dimensional deviations were found to be 5.23 times lower compared to the average of the results. The importance of process parameters was found to follow this order: electropolishing duration, electrolyte composition, cathode diameter, and process voltage. تفاصيل المقالة

با رشد و توسعه فزاینده علم و فناور‌ی‌ نانو، کاربرد نانو سنسورها، سیستم‌های نانو الکترومکانیکی، سیستم‌های نانوالکترونیکی و وسایل نانو فتونیکی رو به افزایش است. نانوسیم‌ها به عنوان یکی از اجزاء کلیدی این سیستم‌ها نقش قابل توجهی در عملکرد درست آنها دارند. بنابراین شناخت رفتار مکانیکی- حرارتی نانوسیم‌ها از اهمیت ویژه‌ای برخوردار است. با توجه به مشکلات اجتناب‌ناپذیر در انجام آزمایش‌های تجربی بر روی نانو‌سیم‌ها، از جمله نیاز به تجهیزات بسیار دقیق و پیشرفته و همچنین هزینه و زمان زیاد مورد نیاز برای انجام این آزمایش‌ها، تعدادی از پژوهشگران به مدل‌سازی و شبیه‌سازی رفتار نانو‌سیم‌ها پرداخته‌اند. شبیه‌سازی دینامیک مولکولی یکی از بهترین روش‌های شناخت خواص نانو‌سیم‌ها می‌باشد که در اغلب شبیه‌سازی‌های نانو مقیاس از این روش استفاده می‌شود. با استفاده از روش‌های شبیه‌سازی و مدل‌سازی می توان خواص نانو‌سیم‌ها را با صرف هزینه اندک و زمان بسیار کوتاهی، در مقایسه با روش‌های تجربی، به انجام رساند. در این مقاله، با هدف شناخت رفتار مکانیکی- حرارتی نانوسیم طلا، تاثیر دما ( 300، 450، 600 و 700 درجه کلوین) و نرخ کرنش (1/s 1082، 1/s 1092 و 1/s 10102) بر خواص مکانیکی نانوسیم از جمله منحنی تنش- کرنش، تنش تسلیم، تنش در لحظه شکست و میزان ازدیاد طول نانوسیم با قطر و طول به ترتیب 3 و 6 نانومتر به روش دینامیک مولکولی با استفاده از روش اتم جایگزین شده (پتانسیل EAM ) بررسی شده است. تفاصيل المقالة