Abstract: We report the results of an experimental study on the fabrication of a multilayer variable reflectivity laser mirror and the morphological analysis of optical thin film layers. In a design procedure, a series of variable reflectivity laser mirrors are fabricated and characterized with different methods. In this research, based on pulsed solid-state Nd:YAG lasers at 1064 nm, two types of variable reflectivity laser mirrors with (HfO₂/SiO₂) and (ZrO₂/SiO₂) materials are fabricated by electron beam evaporation method. The central reflectivity of R₀ =30 and 35 % for two super Gaussian orders of n=3 and 4 is manufactured and qualified by ellipsometry and laser beam scan methods. The Laser-induced damage threshold experiments demonstrated that, the VRMs with multilayers of HfO₂/SiO₂, have a higher Laser-induced damage threshold than ZrO₂/SiO₂, which was 10 J/cm² and 7 J/cm², correspondingly. Also, in a novel and exact FESEM approach, the morphological structure of the VRM thin layers was monitored which gives a deeper insight into the layer structure and helped us to calibrate the PVD device for shaped VRM. تفاصيل المقالة