Design and analysis of a MOEMS accelerometer using all-dielectric meta-materials based on Fano Resonance
الموضوعات :
Mohammad Reza Karimipour
1
(Department of Electrical Engineering, Aliabad Katoul Branch, Islamic Azad University, Aliabad Katoul, Iran.)
Azadeh Naeimi
2
(Department of Physics , Aliabad Katoul Branch;Islamic Azad University, Aliabad Katoul ,Iran)
Nader Javadifar
3
(Department of Electrical Engineering , Aliabad Katoul Branch;Islamic Azad University, Aliabad Katoul ,Iran)
Mohammad Bagher Nasrollahnejad
4
(Department of Electrical Engineering, Gorgan Branch, Islamic Azad University, Gorgan, Iran.)
الکلمات المفتاحية: Accelerometer, MOEMS, Meta-material, Fano resonance, wavelength modulation.,
ملخص المقالة :
This paper introduces a novel micro-opto-electro-mechanical-systems accelerometer that leverages a tunable all-dielectric meta-material. The device operates by modulating the wavelength of incident light-wave. The utilized metamaterial takes advantage of highly tunable ultra-sharp Fano resonance peaks to create a high-performance accelerometer, offering enhanced sensitivity and resolution. Simulation results indicate the functional attributes of the proposed sensor: a mechanical sensitivity of 0.13 nm/g, a linear measurement range spanning ±38.4 g, and an overall sensitivity of 1.17 nm/g. These characteristics render the device applicable across a broad spectrum of uses, from consumer electronics to inertial navigation. This paper introduces a novel micro-opto-electro-mechanical-systems accelerometer that leverages a tunable all-dielectric meta-material. The device operates by modulating the wavelength of incident light-wave. The utilized metamaterial takes advantage of highly tunable ultra-sharp Fano resonance peaks to create a high-performance accelerometer, offering enhanced sensitivity and resolution. Simulation results indicate the functional attributes of the proposed sensor: a mechanical sensitivity of 0.13 nm/g, a linear measurement range spanning ±38.4 g, and an overall sensitivity of 1.17 nm/g. These characteristics render the device applicable across a broad spectrum of uses, from consumer electronics to inertial navigation.
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