The Growth of Diamond-like Carbon Nano-Structures: Investigation of the Affecting Factors
محورهای موضوعی : Journal of NanoanalysisMorasa Amani Malkeshi 1 , karim Zare 2 , Mahmood Ghoranneviss 3 , Zohreh Ghorannevis 4 , Omid moradi 5
1 - Department of Chemistry, Science and Research Branch, Islamic Azad University, Tehran, Iran
2 - Department of Chemistry, Science and Research Branch, Islamic Azad University, Tehran, Iran
3 - Plasma Physics Research Center, Science and Research Branch, Islamic Azad University
4 - Department of Physics, Karaj Branch, Islamic Azad University, Karaj, Iran
5 - Department of Chemistry, Shahr Qods Branch, Islamic Azad University, ShahreQods, Iran
کلید واژه: temperature, catalyst, DLC nano-structures, DC-PECVD,
چکیده مقاله :
Using DC-Plasma Enhanced Chemical Vapour Deposition (PECVD) system, the impact of pure Co onthe growth of diamond-like carbon (DLC) nano-structures were investigated. In this study, Acetylene(C2H2) was diluted in H2 and used as the reaction gas and Cobalt (Co) nano-particles were used asthe catalyst. The effect of preparing Co catalyst at temperatures of 240°C and 350°C and growthconditions was studied. The results showed that the Co catalyst sputtering at 350°C temperature hasa significant impact on purity, morphology, and synthesized diamond-like carbon nano-structures.This research was conducted to investigate the effect of catalyst preparation and growth conditions.Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy were used tocharacterize the diamond-like carbon nano-structures produced under different conditions.
