Sensitivity Analysis of Piezoelectric Microcantilever Excitability as Resonator
محورهای موضوعی :
micro and nano mechanics
Reza Ghaderi
1
1 - Department of Mechanical Engineering, Shahrekord Branch, Islamic Azad University, Sharekord, Iran
تاریخ دریافت : 1401/08/06
تاریخ پذیرش : 1401/12/02
تاریخ انتشار : 1402/06/10
کلید واژه:
Sensitivity analysis,
Excitation Ability,
Piezoelectric Microcantilever,
چکیده مقاله :
Piezoelectric Microcantilevers (MCs) are efficient tools in switches of MEMS, AFMs and nano-resonators. Creating maximum vibrating motion with minimum excitation voltage is important in reducing power consumption and noise in this type of MCs. Therefore, investigating the factors affecting the excitability of MCs, as well as the degree of the effect of each of these factors, have an important role in the design and optimal selection of this type of resonators. Therefore, the aim of this paper was to investigate the excitability of this type of MCs. Modeling is conducted according to Hamilton principle and Euler-Bernoulli theory. Equation of motion was solved using Galerkin method with respect to geometrical discontinuities. Finally, eFAST sensitivity analysis was performed on excitability of MCs using statistical methods. Sensitivity analysis results show that the length and thickness of the piezoelectric layer are the most influential parameters on the excitability of MCs. At L1/L=0.74, the excitability reaches its maximum value.
منابع و مأخذ:
Yilmaz, C., Sahin, R., and Topal, E. S., Exploring the Static Acoustic Force Sensitivity Using Afm Micro-Cantilever Under Single-And Bimodal-Frequency Excitation, Measurement Science and Technology, Vol. 32, No. 11, 2021, pp. 115001.
Alibakhshi, A., et al., Nonlinear Free and Forced Vibrations of a Dielectric Elastomer-Based Microcantilever for Atomic Force Microscopy, Continuum Mechanics and Thermodynamics, 2022, pp. 1-18.
Ghaderi, R., Dehkordi, B. M., and Fard, A. R., Vibration and Sensitivity Analysis of Double-Layered Non-Uniform Piezoelectric Microcantilever as a Self-Sensing Mass Sensor, Physica Scripta, Vol. 96, No. 11, 2021, pp. 115205.
Mistry, K., et al., Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor. Nano letters, Vol. 22, No. 8, 2022, pp. 3196-3203.
Jia, H., Xu, P., and Li, X., Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid. Micromachines, Vol. 12, No. 6, 2021, pp. 645.
Moshirpanahi, A., Haghighi, S. E., and Imam, A., Dynamic Modeling of a Cylindrical Nanoparticle Manipulation by AFM, Engineering Science and Technology, an International Journal, Vol. 24, No. 3, 2021, pp. 611-619.
Mohammadi, S. Z., Moghadam, M., and Pishkenari, H. N., Dynamical Modeling of Manipulation Process in Trolling-Mode AFM, Ultramicroscopy, Vol. 197, 2019, pp. 83-94.
Rotake, D., Darji, A., and Kale, N., Fabrication, Calibration, and Preliminary Testing of Microcantilever‐Based Piezoresistive Sensor for BioMEMS Applications, IET Nanobiotechnology, Vol. 14, No. 5, 2020, pp. 357-368.
Kasambe, P., Bhole, K., and Bhoir, D., Analytical Modelling, Design Optimisation and Numerical Simulation of a Variable Width Cantilever Beam MEMS Switch, Advances in Materials and Processing Technologies, 2021, pp. 1-21.
Angira, M., et al., A Novel Capacitive Rf-Mems Switch for Multi-Frequency Operation, Superlattices and Microstructures, Vo. 133, 2019, pp. 106204.
Caruntu, D. I., et al., Frequency–Amplitude Response of Superharmonic Resonance of Second Order of Electrostatically Actuated MEMS Cantilever Resonators, International Journal of Non-Linear Mechanics, Vol. 133, 2021, pp. 103719.
Park, C., et al., Highly Sensitive and Selective Detection of Single-Nucleotide Polymorphisms Using Gold Nanoparticle MutS Enzymes and a Micro Cantilever Resonator, Talanta, Vol. 205, 2019, pp. 120154.
Mahmoodi Nasrabadi, H., et al., High Resolution Atomic Force Microscopy with an Active Piezoelectric Microcantilever, Review of Scientific Instruments, Vol. 93, No. 7, 2022, pp. 073706.
Niranjan, A., Gupta, P., and Rajoriya, M., Piezoelectric MEMS Micro-Cantilever Biosensor for Detection of SARS–CoV2. in 2021 International Conference on Communication, Control and Information Sciences (ICCISc), IEEE, 2021.
Katta, M., Sandanalakshmi, R., Simultaneous Tropical Disease Identification with PZT-5H Piezoelectric Material Including Molecular Mass Biosensor Microcantilever Collection, Sensing and Bio-Sensing Research, Vol. 32, 2021, pp. 100413.
Manalis, S., Minne, S., and Quate, C., Atomic Force Microscopy for High Speed Imaging Using Cantilevers with an Integrated Actuator and Sensor, Applied Physics Letters, Vol. 68, No. 6, 1996, pp. 871-873.
Rogers, B., et al., Improving Tapping Mode Atomic Force Microscopy with Piezoelectric Cantilevers, Ultramicroscopy, Vol. 100, No. 3-4, 2004, pp. 267-276.
Wolf, K., Gottlieb, O., Nonlinear Dynamics of a Noncontacting Atomic Force Microscope Cantilever Actuated by a Piezoelectric Layer, Journal of Applied Physics, Vol. 91, No. 7, 2002, pp. 4701-4709.
Fung, R. F., Huang, S. C., Dynamic Modeling and Vibration Analysis of The Atomic Force Microscope, J. Vib. Acoust., Vol. 123, No. 4, 2001, pp. 502-509.
Mahmoodi, S. N., Afshari, M., and Jalili, N., Nonlinear Vibrations of Piezoelectric Microcantilevers for Biologically-Induced Surface Stress Sensing, Communications in Nonlinear Science and Numerical Simulation, Vol. 13, No. 9, 2008, pp. 1964-1977.
Mahmoodi, S. N., Jalili, N., Piezoelectrically Actuated Microcantilevers: an Experimental Nonlinear Vibration Analysis, Sensors and Actuators A: Physical, Vol. 150, No. 1, 2009, pp. 131-136.
Mahmoodi, S. N., Jalili, N., and Ahmadian, M., Subharmonics Analysis of Nonlinear Flexural Vibrations of Piezoelectrically Actuated Microcantilevers, Nonlinear Dynamics, Vol. 59, No. 3, 2010, pp. 397-409.
Salehi-Khojin, A., Bashash, S., and Jalili, N., Modeling and Experimental Vibration Analysis of Nanomechanical Cantilever Active Probes, Journal of Micromechanics and Microengineering, Vol. 18, No. 8, 2008, pp. 085008.
