Effect of Catalyst on the Growth of Diamond-like Carbon by HFCVD

محورهای موضوعی : Journal of Physical & Theoretical Chemistry

M. Aghaie ¹ , M. Ghoranneviss ² , Z. Purrajabi ³

1 - -
2 - -
3 - -

تاریخ دریافت : 1394/02/15 تاریخ پذیرش : 1394/02/15 تاریخ انتشار : 1394/02/15

کلید واژه: Diamond like carbon, DLC, HFCVD, Raman sepectroscopy,

چکیده مقاله :

Diamond like carbon (DLC) film was grown by hot filament chemical vapor deposition (HFCVD)technique. In the present work, we investigated the quality of the DLC films groew on the substratesthat were coated with various metal nanocatalysts (Au and Ni). A combination of CH4/Ar/H2 rendersthe growth of carbon nanostructures technique (diamond like carbon). The utilized samples werecharacterized by the scanning electron microscopy (SEM) and Raman spectroscopy techniques.