Mathematically modeling of target speed effect on nonlinearity in DTLMI-based nano-metrology system
محورهای موضوعی : فصلنامه نانوساختارهای اپتوالکترونیکی
Saeed Olyaee
1
(Nano-photonics and Optoelectronics Research Laboratory (NORLab),
Shahid Rajaee Teacher Training University, Lavizan, 16788-15811,
Tehran, Iran, *Tel/Fax: +98-21-22970030.)
Masood Sherafat
2
(Nano-photonics and Optoelectronics Research Laboratory (NORLab),
Shahid Rajaee Teacher Training University, Lavizan, 16788-15811,
Tehran, Iran, *Tel/Fax: +98-21-22970030.)
کلید واژه: Developed Three-Longitudinal Mode Heterodyne Interferometer (DTLMI), Nonlinearity, Jones Matrix Calculations,
چکیده مقاله :
Jones matrix computation is one of the widely used methods in nonlinearity
calculation in laser interferometers. In this paper, the nonlinearity error in developed
three-longitudinal mode heterodyne interferometer (DTLMI) has been mathematically
modeled at various speeds, by using Jones matrix calculations. This review has been done
despite the fact that simultaneously the main factors including non-ideal polarization of
the laser beam and the non-ideal PBS produce nonlinearity. According to the results, it
was found that although nonlinearity error is a pure sinusoid in low velocities, it isn't a
single-sinus and increases in amplitude in high velocities. It was also observed that the
effect of non-ideal PBS on nonlinearity error is less than that of non-ideal laser beam and
frequency of nonlinearity error caused by it is twice more.
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