Design and analysis of a MOEMS accelerometer using all-dielectric meta-materials based on Fano Resonance

Subject Areas : Electrical Engineering

Mohammad Reza Karimipour ¹ (Department of Electrical Engineering, Aliabad Katoul Branch, ‎Islamic Azad University, Aliabad Katoul, Iran.‎)
Azadeh Naeimi ² (Department of Physics , Aliabad Katoul Branch;Islamic Azad University, Aliabad Katoul ,Iran)
Nader Javadifar ³ (Department of Electrical Engineering , Aliabad Katoul Branch;Islamic Azad University, Aliabad Katoul ,Iran)
Mohammad Bagher Nasrollahnejad ⁴ (Department of Electrical Engineering, Gorgan Branch, Islamic Azad ‎University, Gorgan, Iran.‎)

Received: 2024-05-27 Accepted : 2024-07-11 Published : 2024-07-16

Keywords: Accelerometer, MOEMS, Meta-material, Fano resonance, wavelength modulation.,

Abstract :

This paper introduces a novel micro-opto-electro-mechanical-systems accelerometer that leverages a tunable all-dielectric meta-material. The device operates by modulating the wavelength of incident light-wave. The utilized metamaterial takes advantage of highly tunable ultra-sharp Fano resonance peaks to create a high-performance accelerometer, offering enhanced sensitivity and resolution. Simulation results indicate the functional attributes of the proposed sensor: a mechanical sensitivity of 0.13 nm/g, a linear measurement range spanning ±38.4 g, and an overall sensitivity of 1.17 nm/g. These characteristics render the device applicable across a broad spectrum of uses, from consumer electronics to inertial navigation. This paper introduces a novel micro-opto-electro-mechanical-systems accelerometer that leverages a tunable all-dielectric meta-material. The device operates by modulating the wavelength of incident light-wave. The utilized metamaterial takes advantage of highly tunable ultra-sharp Fano resonance peaks to create a high-performance accelerometer, offering enhanced sensitivity and resolution. Simulation results indicate the functional attributes of the proposed sensor: a mechanical sensitivity of 0.13 nm/g, a linear measurement range spanning ±38.4 g, and an overall sensitivity of 1.17 nm/g. These characteristics render the device applicable across a broad spectrum of uses, from consumer electronics to inertial navigation.

References:

[1] I. Odira, J. Keraita, and J. Byiringiro, "Multimode TED-tuned beam mass damper for low-g capacitive MEMS accelerometers VRE reduction," Journal of Vibration and Control, p. 10775463231190442, 2023.
[2] W. Liu et al., "The High-Efficiency Design Method for Capacitive MEMS Accelerometer," Micromachines, vol. 14, no. 10, p. 1891, 2023.
[3] A. Khlifi et al., "Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer," Microelectronics Journal, vol. 128, p. 105552, 2022.
[4] C. Jia et al., "Modeling and Characterization of a Novel In-Plane Dual-Axis MEMS Accelerometer Based on Self-Support Piezoresistive Beam," Journal of Microelectromechanical Systems, vol. 31, no. 6, pp. 867-876, 2022.
[5] X. Gong, Y.-C. Kuo, G. Zhou, W.-J. Wu, and W.-H. Liao, "An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement," Microsystems & Nanoengineering, vol. 9, no. 1, p. 23, 2023.
[6] C. Yang, B. Hu, L. Lu, Z. Wang, W. Liu, and C. Sun, "A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure," Micromachines, vol. 13, no. 10, p. 1608, 2022.
[7] L. Long, Z. Guo, and S. Zhong, "A MEMS accelerometer based on wavelength modulation using an integrated blazed grating," IEEE Sensors Journal, vol. 19, no. 3, pp. 877-884, 2018.
[8] A. Sheikhaleh, K. Abedi, and K. Jafari, "A proposal for an optical MEMS accelerometer relied on wavelength modulation with one dimensional photonic crystal," Journal of Lightwave Technology, vol. 34, no. 22, pp. 5244-5249, 2016.
[9] C. Trigona, B. Andò, and S. Baglio, "Design, fabrication, and characterization of BESOI-accelerometer exploiting photonic bandgap materials," IEEE Transactions on Instrumentation and Measurement, vol. 63, no. 3, pp. 702-710, 2014.
[10] M. Taghavi et al., "Closed-loop MOEMS accelerometer," Optics Express, vol. 30, no. 12, pp. 20159-20174, 2022.
[11] T. Guan, G. Keulemans, F. Ceyssens, and R. Puers, "MOEMS uniaxial accelerometer based on EpoClad/EpoCore photoresists with built-in fiber clamp," Sensors and Actuators A: Physical, vol. 193, pp. 95-102, 2013.
[12] A. Sheikhaleh, K. Abedi, K. Jafari, and R. Gholamzadeh, "Micro-optoelectromechanical systems accelerometer based on intensity modulation using a one-dimensional photonic crystal," Applied optics, vol. 55, no. 32, pp. 8993-8999, 2016.
[13] M. Ahmadian and K. Jafari, "A graphene-based wide-band MEMS accelerometer sensor dependent on wavelength modulation," IEEE sensors Journal, vol. 19, no. 15, pp. 6226-6232, 2019.
[14] W. Su, J. A. Gilbert, M. D. Morrissey, and Y. Song, "General-purpose photoelastic fiber optic accelerometer," Optical Engineering, vol. 36, no. 1, pp. 22-28, 1997.
[15] D. Tang, D. Zhao, Y. Wang, X. Zhang, Z. Liang, and F. Guo, "A MOEMS accelerometer based on photoelastic effect," Optik, vol. 122, no. 7, pp. 635-638, 2011.
[16] R. Wang, T. Li, S. Gong, and X. Qiao, "Multicore Fiber Based Phase-Modulation Interferometer for Demodulation of a Fiber Bragg Grating Accelerometer," Journal of Lightwave Technology, 2023.
[17] Karimipour, M.R., Naeimi, A.S., Javadifar, N., Nasrollahnejad, M.B., " A proposal for an ultra-sensitive nano-displacement sensing system based on all-dielectric metamaterials with tunable ultra-sharp Fano resonance peaks," Optical and Quantum Electronics, vol. 56, 2024.
[18] Q. Zhu et al., "Tunable graphene quadrupole dark mode based ultranarrow Fano resonance in asymmetric hybrid metamaterial," Optics Communications, vol. 510, p. 127927, 2022.
[19] Y. Liu et al., "Full control of fano spectral profile with gst-based metamaterial," ACS Photonics, vol. 9, no. 3, pp. 888-894, 2022.
[20] T. Xiang, T. Lei, J. Wu, J. Wang, and H. Yang, "Dual-Fano resonances based on all-dielectric toroidal metamaterial," Applied Physics Express, vol. 15, no. 3, p. 032002, 2022.
[21] H. Zhao et al., "All-dielectric metastructure based on multiple Fano resonances with high sensitivity," Optics Communications, vol. 530, p. 129193, 2023.
[22] A. Mashkour, A. Koochaki, A. Abdolahzadeh Ziabari, and A. Sadat Naeimi, "Demonstration of Tunable Fano Resonances in a Meta-material Absorber Composed of Asymmetric Double Bars with Bent Arms," Plasmonics, vol. 17, no. 4, pp. 1607-1618, 2022.
[23] M. Zhang, J. Fang, F. Zhang, J. Chen, and H. Yu, "Ultra-narrow band perfect absorbers based on Fano resonance in MIM metamaterials," Optics Communications, vol. 405, pp. 216-221, 2017.
[24] Y. Yang, I. I. Kravchenko, D. P. Briggs, and J. Valentine, "All-dielectric metasurface analogue of electromagnetically induced transparency," Nature communications, vol. 5, no. 1, p. 5753, 2014.
[25] G. K. Fedder, Simulation of microelectromechanical systems. University of California, Berkeley, 1994.