Frequency Response Analysis of a Capacitive Micro-beam Resonator Considering Residual and Axial Stresses and Temperature Changes Effects

Subject Areas : Engineering

S Valilou ¹ , M Jalilpour ²

1 - Department of Mechanical Engineering, Khoy Branch, Islamic Azad University
2 - Department of Mechanical Engineering, Khoy Branch, Islamic Azad University

Received: 2012-11-26 Accepted : 2012-12-28 Published : 2012-12-30

Keywords:

References:

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