Application of Piezoelectric and Functionally Graded Materials in Designing Electrostatically Actuated Micro Switches

Subject Areas : Engineering

A Hosseinzadeh ¹ , M.T Ahmadian ²

1 - Center of Excellence in Design, Robotics and Automation (CEDRA), School of Mechanical Engineering, Sharif University of Technology
2 - Center of Excellence in Design, Robotics and Automation (CEDRA), School of Mechanical Engineering, Sharif University of Technology

Received: 2010-06-24 Accepted : 2010-07-23 Published : 2010-06-30

Keywords:

References:

[1] Hu Y.C., Chang C.M., Huang S.C., 2004, Some design considerations on the electrostatically actuated microstructures, Sensors and Actuators A 112: 155-161.

[2] Osterberg P.M., 1995, Electrostatically Actuated Micro Electromechanical Test Structures for Material Property Measurement, PhD dissertation, Massachusetts Institute of Technology.

[3] Ahmadian M.T., Borhan H., Esmailzadeh E., 2009, Dynamic analysis of geometrically nonlinear and electrostatically actuated micro-beams, Communications in Nonlinear Science and Numerical Simulation 14(4): 1627-1645.

[4] Nayfeh A.H., Younis M.I., 2004, A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze film damping, Journal of Micromechanics and Microengineering, 14(2): 170-181.

[5] Moghimi Zand M., Ahmadian M.T., 2009, Vibrational analysis of electrostatically actuated microstructures considering nonlinear effects, Communications in Nonlinear Science and Numerical Simulation, 14(4): 1664-1678.

[6] Lin Ch.-Ch., Huang H.-N., 1999, Vibration control of beam-plates with bonded piezoelectric sensors and actuators, Computers and Structures 73: 239-248.

[7] Collet M., Walter V., Delobelle P., 2003, Active damping of a micro-cantilever piezo-composite beam, Journal of Sound and Vibration 260: 453-476.

[8] Meirovitch L., 1997, Principles and Techniques of Vibrations, Englewood Cliffs, Prentice Hall Inc, Nj.

[9] Moheimani R., Fleming A.J., 2006, Piezoelectric Transducers for Vibration Control and Damping (Advances in Industrial Control), First Edition, Springer.

[10] Preumont A., 2006, Mechatronics: Dynamics of Electromechanical and Piezoelectric Systems, Springer.

[11] Najafizadeh M.M., Eslami M.R., 2002, First-order theory based thermo elastic stability of functionally graded material circular plates, AIAA Journal 40: 1444-1450.

[12] Veijola T., Kuisma H., Lahdenpera J., Ryhanen T., 1995, Equivalent-circuit model of the squeezed gas film in a silicon accelerometer, Sensors and Actuators A 48: 235-248.

[13] Jang D.S., Kim D.E, 1996, Tribological behavior of ultra-thin soft metallic deposits on hard substrates, Wear 196: 171-179.

[14] Moghimi Zand M., Ahmadian M.T., 2007, Characterization of coupled-domain multi-layer micro plates in pull-in phenomenon, vibrations and dynamics, International Journal of Mechanical Sciences 49: 1226-1237.

[15] Krylov S., 2007, Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures, International Journal of Non-Linear Mechanics 42(4): 626-642.