Effect of Electric Potential Distribution on Electromechanical Behavior of a Piezoelectrically Sandwiched Micro-Beam

Subject Areas : Engineering

A Shah-Mohammadi-Azar ¹ , G Rezazadeh ² , R Shabani ³

1 - Mechanical Engineering Department, Urmia University
2 - Mechanical Engineering Department, Urmia University
3 - Mechanical Engineering Department, Urmia University

Received: 2011-11-15 Accepted : 2012-01-13 Published : 2012-03-30

Keywords:

References:

[1] Fathalilou M., Motallebi A., Yagubizade H., Rezazadeh G., Shirazi K., Alizadeh Y., 2009, Mechanical Behavior of an Electrostatically-Actuated Micro-beam under Mechanical Shock, Journal of Solid Mechanics 1: 45-57.

[2] Yao J.J., 2000, RF-MEMS from a device perspective, Journal of Micromechanics and Micro engineering 10: 9-38.

[3] Afrang S., Abbaspour E., 2002, A low voltage electrostatic torsional micro machined microwave actuator, In: Proceedings of the 2002 IEEE international conference on semiconductor electronics (ICSE 2002) Penang, Malaysia 100–104.

[4] Balaraman D., Bhattacharya S.K., 2002, Low-cost low actuation voltage copper RF MEMS actuators. In: Proceeding of the Microwave Symposium Digest, 2002 IEEE MTT-S International, Seattle, WA 2: 1225–1228.

[5] Peroulis D., Pacheo S.P., Sarabandi K., 2003, Electromechanical considerations in developing low-voltage RF MEMS actuators, IEEE Transaction on microwave theory and thecniques 51(1): 259–270.

[6] Sbaizero O., Lucchini E., 1996, Influence of residual stresses on the mechanical properties of a layered ceramic composite, Journal of the European Ceramic Society 16(8): 813-818.

[7] Pascual J., Lube T., Danzer R., 2008, Fracture statistics of ceramic laminates strengthened by compressive residual stresses, Journal of the European Ceramic Society 28(8): 1551-1556.

[8] Hayes M., Rivlin R.S., 1961, Surface waves in deformed elastic materials, Archive for Rational Mechanics and Analysis 8: 359–439.

[9] Hirao M., Fukuoka H., Hori K., 1981, Acoustoelastic effect of Rayleigh surface wave in isotropic material, Journal of Applied Mechanics 48: 119–43.
[10] Kumar A., Weizel U., Mittemeijer E.J., 2006, Analysis of gradients of mechanical stresses by X-ray diffraction measurements at fixed penetration/information depths, Journal of Applied Crystallography39: 633-646.

[11] Cammarata R.C., Sieradzki, K., Spaepen, F., 2000, Simple model for interface stresses with application to misfit dislocation generation in epitaxial thin films, Journal of Applied Physics 87(3): 1227-1234.

[12] Freund L.B., Suresh S., 2003, Thin Film Materials: Stress, Defect Formation and Surface Evolution, Cambridge University Press.

[13] Quang H.L., He Q.C., 2009, Estimation of the effective thermo-elastic moduli of fibrous nano composites with cylindrically anisotropic phases, Archive for Applied Mechanics 79: 225–248.

[14] Hosseinzadeh A., Ahmadian M.T., 2010, Application of Piezoelectric and Functionally Graded Materials in Designing Electrostatically Actuated Micro Switches, Journal of Solid Mechanics 2: 179-189.

[15] Coughlin M.F., Stamenovic D., Smits J.G., 1996, Determining material stiffness using piezoelectric bimorphs, in: Proceedings of the 1996 IEEE ultrasonic Symposium 2: 1607–1610.

[16] Mortet V., Petersen R., Haenen K., Olieslaeger M. D., 2006, Wide range pressure sensor based on a piezoelectric bimorph micro-cantilever, Applied Physic Letters 88 (13) : 133511–15.

[17] Olli K., Kruusing A., Pudas M., Rahkonen T., 2009, Piezoelectric bimorph charge mode force sensor. Journal of Sensors and Actuators A: Physical 153: 42–49.

[18] Rezazadeh G., Tahmasebi A., Zubstov M., 2006, Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage, Microsystem Technologies 12: 1163–1170.

[19] Zamanian M., Khadem S.E., Mahmoodi S.N., 2008 , The effect of a piezoelectric layer on the mechanical behavior of an electrostatic actuated micro-beam, Smart Materials and Structures 17 : 065024–15.

[20] Rezazadeh G., Tahmasebi A., 2009, Electromechanical behavior of micro-beams with piezoelectric and electrostatic actuation, Sensing and Imaging: an International Journal 10: 15–30.

[21] Rezazadeh G., Fathalilou M., Shabani R., 2009, Static and dynamic stabilities of a microbeam actuated by a piezoelectric voltage, Microsystem Technologies 15: 1785–1791.

[22] Azizi S., Rezazadeh G., Ghazavi M.R., Esmaeilzadeh Khadem S.,2012, Parametric excitation of a piezoelectrically actuated system near Hopf bifurcation, Journal of Applied Mathematical Modelling 36 : 1529–1549.

[23] Quek S.T., Wang Q., 2000, On dispersion relations in piezoelectric coupled plate Structures, Smart Material Structure 9: 859–67.

[24] Moheimani R., Fleming A.J., 2006, Piezoelectric Transducers for Vibration Control and Damping (Advances in Industrial Control), First Edition, Springer.

[25] Zhu M., Leighton G., 2008, Dimensional Reduction Study of Piezoelectric Ceramics Constitutive Equations from 3-D to 2-D and 1-D, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 55(11): 2377-2383.

[26] Pietrzakowski M., 2007, Piezoelectric control of composite plate vibration: Effect of electric potential distribution, Computers and Structures 86: 948–954.

[27] Kant T., Shiyekar S.M., 2008, Cylindrical bending of piezoelectric laminates with a higher order shear and normal deformation theory, Computers and Structures 86 : 1594–1603.

[28] Nabian A., Rezazadeh G., Haddad-derafshi M., Tahmasebi A., 2008, Mechanical behavior of a circular micro plate subjected to uniform hydrostatic and non-uniform electrostatic pressure, Microsystem Technologies 14: 235–240.

[29] Nayfeh A.H., Mook D.T., 1979, Nonlinear oscillations. Wiley, NewYork, Microsystem Technologies 14: 235–240.

[30] Ramamurty U., Sridhar S., Giannakopolos A. E., Suresh S., 1999, An experimental study of spherical indentation on piezoelectric materials, Acta material 47(8): 2417-2430.

[31] Crawley E. F., Luis J. D., 1987, Use of piezoelectric actuators as elements of intelligent structures, AIAA Journal 25(10): 1373–1385.