Characterization of the Viscoelastic Q-Factor of Electrically Actuated Rectangular Micro-Plates
Subject Areas :
Mechanics of Solids
E Keykha
1
,
H Rahmani
2
,
H Moeinkhah
3
,
M Salehi Kolahi
4
1 - Department of Mechanical Engineering, University of Sistan and Baluchestan, Zahedan, Iran
2 - Department of Mechanical Engineering, University of Sistan and Baluchestan, Zahedan, Iran
3 - Department of Mechanical Engineering, University of Sistan and Baluchestan, Zahedan, Iran
4 - Department of Mechanical Engineering, University of Sistan and Baluchestan, Zahedan, Iran
Received: 2022-07-09
Accepted : 2022-09-14
Published : 2022-12-01
Keywords:
References:
Bogue R.,2009, The Fast‐Moving World of MEMS Technology, Assembly Automation.
Senturia S.D.,2009, Microsystem Design, Kluwer Academic Publishers, Boston.
Judy J.W., 2001, Microelectromechanical systems (MEMS): fabrication, design and applications, Smart Materials and Structures 10(6):1115.
Younis M.I., 2011, MEMS Linear and Nonlinear Statics and Dynamics, Springer Science & Business Media.
Krylov S., Ilic B.R., Schreiber D., Seretensky S., Craighead H., 2008, The pull-in behavior of electrostatically actuated bistable microstructures, Journal of Micromechanics and Microengineering 18(5): 055026.
Sharma J., Grover D., 2012, Thermoelastic vibration analysis of Mems/Nems plate resonators with voids, Acta Mechanica 223(1):167-187.
Pourkamali S., Hashimura A., Abdolvand R., Ho G.K., Erbil A., Ayazi F., 2003, High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps, Journal of Microelectromechanical Systems 12(4): 487-496.
Nayfeh A.H., Younis M.I., 2004, Modeling and simulations of thermoelastic damping in microplates, Journal of Micromechanics and Microengineering 14(12): 1711.
Grootenhuis P., 1970, The control of vibrations with viscoelastic materials, Journal of Sound and Vibration 11(4): 421-433.
Vogl G.W., Nayfeh A.H., 2003, A reduced-order model for electrically actuated clamped circular plates, International Design Engineering Technical Conferences and Computers and Information in Engineering Conference.
Zhao X., Abdel-Rahman E.M., Nayfeh A.H., 2004, A reduced-order model for electrically actuated microplates, Journal of Micromechanics and Microengineering 14(7): 900.
Murmu T., Pradhan S., 2009, Small-scale effect on the free in-plane vibration of nanoplates by nonlocal continuum model, Physica E: Low-dimensional Systems and Nanostructures 41(8):1628-1633.
Talebian S., Rezazadeh G., Fathalilou M., Toosi B., 2010, Effect of temperature on pull-in voltage and natural frequency of an electrostatically actuated microplate, Mechatronics 20(6): 666-673.
Saghir S., Younis M.I., 2016, An investigation of the static and dynamic behavior of electrically actuated rectangular microplates, International Journal of Non-Linear Mechanics 85: 81-93.
Li Z., Zhao L., Jiang Z., Zhao Y., Li J., Zhang J., Zhao Y., Lin L., 2018, A closed-form approach for the resonant frequency analysis of clamped rectangular microplates under distributed electrostatic force, Sensors and Actuators A: Physical 280: 447-458.
Grover D., Seth R., 2019, Generalized viscothermoelasticity theory of dual-phase-lagging model for damping analysis in circular micro-plate resonators, Mechanics of Time-Dependent Materials 23(1):119-132.
Lifshitz R., Roukes M.L., 2000, Thermoelastic damping in micro-and nanomechanical systems, Physical Review B 61(8): 5600.
Duwel A., Candler R.N., Kenny T.W., Varghese M., 2006, Engineering MEMS resonators with low thermoelastic damping, Journal of Microelectromechanical Systems 15(6):1437-1445.
Sun Y., Saka M., 2010, Thermoelastic damping in micro-scale circular plate resonators, Journal of Sound and Vibration 329(3): 328-337.
Borjalilou V., Asghari M., Bagheri E., 2019, Small-scale thermoelastic damping in micro-beams utilizing the modified couple stress theory and the dual-phase-lag heat conduction model, Journal of Thermal Stresses 42(7): 801-814.
Yang L., Li P., Fang Y., Zhou H., 2020, Thermoelastic damping in bilayer microbeam resonators with two-dimensional heat conduction, International Journal of Mechanical Sciences 167:105245.
Leissa A.W., Qatu M.S., 2011, Vibrations of Continuous Systems, McGraw-Hill.
Rao S.S., 2007,Vibration of Continuous Systems,Wiley Online Library.
Lei Y., Adhikari S., Friswell M., 2013, Vibration of nonlocal Kelvin–Voigt viscoelastic damped Timoshenko beams, International Journal of Engineering Science 66:1-13.
Amabili M., 2016, Nonlinear vibrations of viscoelastic rectangular plates, Journal of Sound and Vibration 362:142-156.
Li Z., Zhao L., Jiang Z., Ye Z., Dai L., Zhao Y., 2015, Mechanical behavior analysis on electrostatically actuated rectangular microplates, Journal of Micromechanics and Microengineering 25(3): 035007.
Zener C., 1937, Internal friction in solids. I. Theory of internal friction in reeds, Physical Review 52(3): 230.
Sun Y., Fang D., Soh A.K., 2006, Thermoelastic damping in micro-beam resonators, International Journal of Solids and Structures 43(10): 3213-3229.
Nayfeh A.H., Younis M.I., Abdel-Rahman E.M., 2007, Dynamic pull-in phenomenon in MEMS resonators, Nonlinear Dynamics 48(1):153-163.