Design and Simulation of a Dual-Mode Resonant Temperature sensor Based on MEMS Technology

Subject Areas : Majlesi Journal of Telecommunication Devices

Elham Farzanegan ¹ , Farshad Babazadeh ²

1 - Department of Electrical Engineering, Faculty of Engineering, Yadegar-e-Emam Khomeini (RAH) Shahr-e-Rey Branch, Islamic Azad University, Tehran, Iran
2 -

Received: 2019-10-21 Accepted : 2019-10-23 Published : 2019-12-01

Keywords:

References:

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