Preparation and Characterization of Molybdenum Trioxide Thin Films Grown by Two-Step Method: DC Sputtering and Plasma Oxidation

Subject Areas : Journal of Environmental Friendly Materials

Nouri Z ¹ , Hojabri A ² , Hajakbari F ³

1 - Department of Physics, Karaj Branch, Islamic Azad University, Karaj, Iran
2 - Advanced Materials Engineering Research Center, Karaj Branch, Islamic Azad University, Karaj, Iran
3 - Advanced Materials Engineering Research Center, Karaj Branch, Islamic Azad University, Karaj, Iran

Received: 2020-09-25 Accepted : 2020-12-09 Published : 2020-12-01

Keywords: Nanostructure, Thin Film, MoO3, Sputtering, Plasma Oxidation,

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