Influence of O2 and N2 Concentrations on the Characteristics of Plasma in DC Cylindrical Magnetron Discharge by Langmuir Probe

Subject Areas : Polymer

Kiomars  Yasserian ¹ ()
Zahra  Karimi ² ()

Received: 2016-12-31 Accepted : 2016-12-31 Published : 2017-01-01

Keywords: Plasma discharge, Langmuir probe, Magnetron sputtering, oxynitride thin films, plasma parameters,