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Journal of Applied Chemical Research

Issue 1 Vol. 11 Winter 2017

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  - Kiomars Yasserian
  - Zahra Karimi
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  - Zahra Karimi

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Manuscript ID : 527179 Visit : 259 Page: 35 - 43

20.1001.1.20083815.2017.11.1.3.4

Article Type: Original Research

Influence of O2 and N2 Concentrations on the Characteristics of Plasma in DC Cylindrical Magnetron Discharge by Langmuir Probe

Subject Areas : Polymer

Kiomars Yasserian ¹ , Zahra Karimi ²

1 -
2 -

Received: 2016-12-31 Accepted : 2016-12-31 Published : 2017-01-01

Keywords: Plasma discharge, Langmuir probe, Magnetron sputtering, oxynitride thin films, plasma parameters,

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