Memory effect in silicon nitride deposition using ICPCVD technique
Subject Areas : Journal of Theoretical and Applied Physics
Sunil Kumar
1
(
Solid State Physics Laboratory
)
D. S. Rawal
2
(
Solid State Physics Laboratory
)
Hitendra K. Malik
3
(
Department of Physics, Indian Institute of Technology Delhi
)
Rajeev Sanwal
4
(
Solid State Physics Laboratory
)
S. A. Khan
5
(
Interstate University Accelerator Center
)
Seema Vinayak
6
(
Solid State Physics Laboratory
)
Keywords:
Abstract :
