Role of Ar/O2 mixture on structural, compositional and optical properties of thin copper oxide films deposited by DC magnetron sputtering

Subject Areas : Journal of Theoretical and Applied Physics

N. Aghilizadeh ¹ , A. H. Sari ² , D. Dorranian ³

1 - Plasma Physics Research Center, Science and Research Branch, Islamic Azad University
2 - Plasma Physics Research Center, Science and Research Branch, Islamic Azad University
3 - Plasma Physics Research Center, Science and Research Branch, Islamic Azad University

Accepted : 2017-12-01 Published : 2017-12-01

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