Role of Ar/O2 mixture on structural, compositional and optical properties of thin copper oxide films deposited by DC magnetron sputtering

Aghilizadeh, N.; Sari, A. H.; Dorranian, D.

doi:10.1007/s40094-017-0268-6

Journal of Theoretical and Applied Physics

Issue 4 Vol. 0 Autumn 2017

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Manuscript ID : 18642 Visit : 41 Page: 285 - 290

10.1007/s40094-017-0268-6

Article Type: Original Research

Role of Ar/O2 mixture on structural, compositional and optical properties of thin copper oxide films deposited by DC magnetron sputtering

Subject Areas : Journal of Theoretical and Applied Physics

N. Aghilizadeh ¹ (Plasma Physics Research Center, Science and Research Branch, Islamic Azad University)
A. H. Sari ² (Plasma Physics Research Center, Science and Research Branch, Islamic Azad University)
D. Dorranian ³ (Plasma Physics Research Center, Science and Research Branch, Islamic Azad University)

Published : 2017-12-01

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Role of Ar/O2 mixture on structural, compositional and optical properties of thin copper oxide films deposited by DC magnetron sputtering

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