Influence of argon gas flow on mechanical and electrical properties of sputtered titanium nitride thin films
Subject Areas : Journal of Theoretical and Applied Physics
Kaykhosrow Khojier
1
(
Department of Physics, Chalous Branch, Islamic Azad University
)
Hadi Savaloni
2
(
Department of Physics, University of Tehran
)
Ebrahim Shokrai
3
(
Department of Physics, Faculty of Science, Central Tehran Branch, Islamic Azad University
)
Zohreh Dehghani
4
(
Department of Physics, Faculty of Science, Central Tehran Branch, Islamic Azad University
)
Naser Zare Dehnavi
5
(
Department of Physics, Faculty of Science, Central Tehran Branch, Islamic Azad University
)
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Abstract :
