Influence of argon gas flow on mechanical and electrical properties of sputtered titanium nitride thin films

Subject Areas : Journal of Theoretical and Applied Physics

Kaykhosrow Khojier ¹ , Hadi Savaloni ² , Ebrahim Shokrai ³ , Zohreh Dehghani ⁴ , Naser Zare Dehnavi ⁵

1 - Department of Physics, Chalous Branch, Islamic Azad University
2 - Department of Physics, University of Tehran
3 - Department of Physics, Faculty of Science, Central Tehran Branch, Islamic Azad University
4 - Department of Physics, Faculty of Science, Central Tehran Branch, Islamic Azad University
5 - Department of Physics, Faculty of Science, Central Tehran Branch, Islamic Azad University

Accepted : 2013-12-01 Published : 2013-12-01

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