Microstructure evolution in zirconium carbide thin films at different substrate temperatures

Heidarnia, Ali; Ghomi, Hamid

doi:10.30495/jtap.162217

Journal of Theoretical and Applied Physics

Issue 2 Vol. 16 Spring 2022

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Manuscript ID : JTAP-2202-1032 (R1) Visit : 30 Page: 1 - 6

10.30495/jtap.162217

Article Type: Original Research

Microstructure evolution in zirconium carbide thin films at different substrate temperatures

Subject Areas : Journal of Theoretical and Applied Physics

Ali Heidarnia ¹ (Laser and Plasma Research Institute, Shahid Beheshti university)
Hamid Ghomi ² (Laser and Plasma Research Institute, Shahid Beheshti University)

Received: 2022-02-20 Accepted : 2022-05-04 Published : 2022-06-01

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Microstructure evolution in zirconium carbide thin films at different substrate temperatures

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