تأثیر نسبت جریان N2/Ar بر خواص ساختاری، مکانیکی و رفتار خوردگی لایه‌های TaN

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Logical Operator

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Journal of Mechanical Research and Application

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Downloads : 25

Manuscript ID : 702232 Visit : 66 Page: 33 - 42

Article Type: Original Research

Subject Areas : Smart & Advanced Materials

مهدی منوچهریان ¹

1 - Department of physics, south Tehran branch, Islamic Azad university, Tehran, Iran

Received: 2023-05-26 Accepted : 2023-05-26 Published : 2022-05-22

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